Dual-mode micro flowmeter and preparation method thereof

A tachometer and flow velocity technology, which is used in the measurement of fluid velocity using thermal variables and the use of cyclone flowmeters to measure fluid velocity, etc. The effect of mass production

Active Publication Date: 2018-09-28
中国空气动力研究与发展中心超高速空气动力研究所
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  • Abstract
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  • Application Information

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Problems solved by technology

[0005] The object of the present invention is to provide a kind of micro flow meter that combines two working modes of surface flow hot film det

Method used

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  • Dual-mode micro flowmeter and preparation method thereof
  • Dual-mode micro flowmeter and preparation method thereof
  • Dual-mode micro flowmeter and preparation method thereof

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Embodiment Construction

[0035] The present invention will be further described in detail below in conjunction with the accompanying drawings, so that those skilled in the art can implement it with reference to the description.

[0036] It should be understood that terms such as "having", "comprising" and "including" as used herein do not entail the presence or addition of one or more other elements or combinations thereof.

[0037] Such as figure 1 As shown, the present invention discloses a dual-mode micro flow meter, comprising:

[0038] The lower plate 3 is adjacently provided with a heat-sensitive film resistor I4 for flow rate detection and a heat-sensitive film resistor II5 for temperature compensation, wherein the heat-sensitive film resistor II5 is used to detect the fluid temperature, so as to measure the temperature of the measurement result. amend;

[0039] The middle pole plate 2 is a door-shaped structure, and the beam of the door-shaped structure is a micro-vortex generator 10; the mi...

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Abstract

The invention discloses a dual-mode micro flowmeter and a preparation method thereof. The dual-mode micro flowmeter comprises an lower electrode plate, a middle electrode plate and an upper electrodeplate; the lower electrode plate is provided with a heat-sensitive film resistor I for flow rate detection and a heat-sensitive film resistor II for temperature compensation; the middle electrode plate is of an n-shaped structure, and a cross beam of the n-shaped structure is a micro vortex generator; the middle electrode plate is connected to the upper portion of the lower electrode plate; the upper electrode plate is connected to the upper portion of the middle electrode plate; the lower electrode plate, the middle electrode plate and the upper electrode plate are connected to form a micro flowmeter measuring cavity; flowing fluid is guided into the micro flowmeter measuring cavity through the lower electrode plate, the middle electrode plate and the upper electrode plate; the heat-sensitive film resistor I is heated through the galvanization of a lead electrode I connected with the heat-sensitive film resistor I and then detects heat loss caused by flowing; the heat-sensitive film resistor II is heated through the galvanization of a lead electrode II connected with the heat-sensitive film resistor II and detects the temperature in the flowing fluid; the micro vortex generator disturbs a flow field, so that periodic vortices occur in the micro flowmeter, and the flow rate in a pipe is obtained according to the separation frequency of the vortices.

Description

technical field [0001] The invention belongs to the technical field of flow velocity measurement and sensing, and in particular relates to a micro flowmeter which combines two working modes of surface flow hot film detection and Karman vortex street separation frequency detection. Background technique [0002] In all fields of production and life, there is a huge demand for miniature, lightweight, low power consumption, and high-performance micro flow meters. For example, in the study of flow mechanism, it is necessary to obtain the instantaneous flow velocity and fluctuating velocity of the turbulent boundary layer, and the flow velocity information of the point position is also required for three-dimensional turbulent flow problems and flow control; in the aspect of fluid machinery and aircraft optimization design, it is necessary to directly measure the surface of the carrier The distribution of the flow field; in the field of life sciences, microfluidic technology is use...

Claims

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Application Information

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IPC IPC(8): G01P5/12G01P5/01
CPCG01P5/01G01P5/12Y02A20/00
Inventor 邱华诚闵夫皮兴才毛春满龙正义
Owner 中国空气动力研究与发展中心超高速空气动力研究所
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