Multi-degree-of-freedom active vibration isolation device and method

Abstract

The invention discloses a multi-degree-of-freedom active vibration isolation device and method. The device includes a platform and six support legs arranged on the lower edge of a support platform. The six support legs are evenly arranged in two rows, wherein each support leg includes a double chamber vertical air spring and a horizontal air spring disposed at a lower end of the double chamber vertical air spring. Each support leg is provided with a pneumatic proportional valve, a pressure sensor for detecting gas pressure, a displacement sensor and a speed sensor, which are respectively electrically connected by a controller. Each pneumatic proportional valve is in communication with the double chamber vertical air spring and the horizontal air spring of the corresponding support leg. Theinvention has advantages of suppressing the resonance peak and effectively isolating the vibration exceeding the natural frequency.

Description

technical field [0001] The invention relates to the technical field of precision machining, in particular to a multi-degree-of-freedom active vibration isolation device and method suitable for precision vibration isolation without electromagnetic interference and capable of suppressing resonance peaks. Background technique [0002] With the development of technologies such as precision ultra-precision machining and ultra-precision measurement, the influence of low-frequency and ultra-low-frequency vibration has become very prominent. Therefore, it is of great significance to study active vibration isolation technology for low-frequency and ultra-low frequency. Active vibration isolation systems are widely used in the field of semiconductor processing and manufacturing represented by IC lithography machines, the field of precision measurement represented by projection electron microscopes, the field of precision machining represented by precision lathes, and the medical field ...

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Problems solved by technology

[0005] The purpose of the present invention is to overcome the disadvantages that the active vibration isolation system in the prior art may introduce relatively large electromagnetic interference, large volume and weight, and oil will pollute the environment, and provide a non-electromagnetic interference that can suppress the resonance peak. Multi-degree-of-freedom active vibration isolation device and method suitable for precision vibration isolation, multi-degree-of-freedom active vibration isolation device and method suitable for precision vibration isolation

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