Device and method for measuring focusing distance in optical focusing mechanism

A technology for optical focusing and measuring devices, applied in measuring devices, electrical devices, instruments, etc., can solve problems such as the inability to achieve high-precision measurement of large displacements, and achieve the effect of improving environmental adaptability and low cost

Active Publication Date: 2018-10-19
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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  • Abstract
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  • Application Information

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Problems solved by technology

[0004] The invention provides a focusing distance measuring device in an optical focusing mechanism, which solves the problem that a miniaturized and lightweight precision measuring system cannot realize high-precision measurement of large displacements

Method used

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  • Device and method for measuring focusing distance in optical focusing mechanism
  • Device and method for measuring focusing distance in optical focusing mechanism
  • Device and method for measuring focusing distance in optical focusing mechanism

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Embodiment Construction

[0043] The preferred embodiments of the present invention will be described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described here are only used to illustrate and explain the present invention, and are not intended to limit the present invention.

[0044] see figure 1 , figure 2 and image 3 , a focusing distance measuring device in an optical focusing mechanism, the optical focusing mechanism includes a focusing base 1, a focusing moving mirror frame 2, and a driving assembly 3; the focusing distance measuring device includes a sensor assembly.

[0045] The sensor assembly includes an eddy current sensor 4 and a diamond-shaped test piece 5; a moving mirror group is fixed on the focusing moving mirror frame 2; the focusing moving mirror frame 2 is connected to the focusing base 1 through a guide rail 18, wherein the focusing moving mirror frame 2 can The guide rail 18 makes a linear reciprocating motion in ...

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Abstract

The invention particularly relates to a device and a method for measuring a focusing distance in an optical focusing mechanism, which solves the problem that a miniaturized and lightweight precision measuring system cannot achieve high-precision measurement of large displacement. The device for measuring the focusing distance in the optical focusing mechanism comprises a sensor component; the sensor component comprises an eddy current sensor and a diamond-shaped measured piece; a focusing moving mirror frame is connected to a focusing base through a guiding rail, wherein the focusing moving frame can do straight reciprocating motion in the direction of the optical axis along the guide rail; a driving component is arranged on the focusing base; the driving component drives the focusing moving frame to linearly reciprocate along the guiding rail in the direction of the optical axis; the diamond-shaped measured piece is fixed on the focusing moving frame, and the eddy current sensor indirectly obtains the displacement distance of the focusing moving frame along the direction of the optical axis by measuring the moving distance of the diamond-shaped measured piece.

Description

technical field [0001] The invention specifically relates to a focusing distance measuring device and a measuring method in an optical focusing mechanism. Background technique [0002] At present, in the field of high-precision displacement measurement technology, in the application of micro-displacement measurement, resistance strain displacement sensors, capacitive displacement sensors, and inductive displacement sensors based on electrical feedback measurement methods dominate, with small size, high sensitivity, and high resolution. High efficiency, low cost and other advantages, but there is also the limitation of small measurement range. In addition, contact displacement sensors such as resistance strain sensors are greatly affected by factors such as temperature and sensor installation errors; in large displacement measurement applications, based on optical feedback measurement The grating type displacement sensor and dual-frequency laser interferometer of the method a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B7/02
CPCG01B7/02
Inventor 张洪伟陈卫宁史魁杨洪涛
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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