Degumming liquid preparation system for silicon wafer adopting diamond wire cutting

A diamond wire cutting and silicon wafer degumming technology is applied in the field of silicon wafer degumming liquid configuration system, which can solve the problems of reduced production efficiency, prolonged production time, incomplete degumming of silicon wafers, etc., so as to reduce energy consumption and improve production efficiency. Effect

Inactive Publication Date: 2018-11-06
SHANDONG DAHAI NEW ENERGY DEV
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  • Description
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Problems solved by technology

Obviously, the configuration of degumming liquid solvents such as water is essential in the degumming process of silicon wafers. The temperature of the solvent is an important factor directly related to product quality and production efficiency. If the temperature does not meet the cleaning requirements, it may cause silicon wafer degumming failure. Completely, even cracks, damage and other quality problems, directly lead to waste of materials, reduce production efficiency, and prolong product production time

Method used

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  • Degumming liquid preparation system for silicon wafer adopting diamond wire cutting
  • Degumming liquid preparation system for silicon wafer adopting diamond wire cutting
  • Degumming liquid preparation system for silicon wafer adopting diamond wire cutting

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Embodiment Construction

[0048] In order to explain the overall concept of the present invention more clearly, the following will be described in detail by way of examples in conjunction with the accompanying drawings.

[0049] In the following description, many specific details are set forth in order to fully understand the present invention. However, the present invention can also be implemented in other ways different from those described here. Therefore, the protection scope of the present invention is not limited by the specific details disclosed below. EXAMPLE LIMITATIONS.

[0050] In addition, in the description of the present invention, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal" ", "Top", "Bottom", "Inner", "Outer", "Axial", "Radial", "Circumferential" and other indicated orientations or positional relationships are based on the orientations or positional relationships shown in the drawings , is only for the co...

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Abstract

The invention provides a degumming liquid preparation system for a silicon wafer adopting diamond wire cutting. According to the degumming liquid preparation system for the silicon wafer adopting diamond wire cutting, solvent of degumming liquid can be preheated constantly for a long time. When a degumming machine needs to be supplied with the degumming liquid, the solvent meeting the temperaturerequirement can be directly conveyed to a liquid groove without the need for heating, or the solvent is fast heated for a short time in advance and then is conveyed. In addition, heat production of anupstream silicon wafer cutting procedure of the process of the degumming machine serves as the main heat source for preheating, energy consumption of heating is reduced, the purpose of cutting liquidcooling can also be achieved while the solvent is preheated, recycling of the degumming liquid is facilitated, high temperature erosion possibly generated in the downstream procedures of cutting liquid pressurization and pressure filtration separation of the process can be avoided, and multiple effects are achieved with one action.

Description

technical field [0001] The invention relates to material cutting, in particular to silicon chip cutting, and in particular to a silicon chip degumming chemical solution configuration system using diamond wire cutting. Background technique [0002] At present, the world's energy structure is developing in a certain direction. Although it is mainly based on non-renewable resources such as oil, coal, and natural gas, with the development of social economy, the development of new energy technologies, and the change of people's ideas, more and more attention has been paid to it. The application of new renewable resources, among which solar energy has the greatest development potential due to its clean and non-polluting advantages, and can be used as an energy source that can be almost infinitely developed. [0003] At this stage, the main way to utilize solar energy is to convert solar energy into thermal energy through heat collection, or to convert solar energy into electrical ...

Claims

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Application Information

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IPC IPC(8): B28D5/04F28D7/08F24H1/20F24H9/18F24H9/20
CPCB28D5/0058B28D5/0082B28D5/045F24H1/201F24H9/1818F24H9/2021F28D7/08
Inventor 樊明仲张孟军杨海峰顾汉中
Owner SHANDONG DAHAI NEW ENERGY DEV
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