Vibration displacement measurement device on basis of optical interference
A technology of vibration device and diffraction device, which is applied to measuring devices, adopts optical devices, and measures ultrasonic/sonic/infrasonic waves, etc. It can solve the problems of large vibration signal extraction and detection, errors, etc., and achieve less measurement interference factors and high measurement sensitivity Effect
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[0013] Below in conjunction with accompanying drawing, make further detailed description:
[0014] The main structure of this embodiment includes two parts: the electrostatic excitation vibration device of the beam and the photodetector signal detection device. The electrostatic excitation vibration device of the beam is characterized in that: the electrostatic excitation vibration device of the beam is composed of an AC signal source 8, an electrostatic drive plate 7, a bottom plate 10, a cantilever beam 1, a side plate 5, a sound wave 4, a switch 9 and wire composition. The electrostatic drive plate 7 is fixed on the bottom plate 10, located directly above the cantilever beam 1, and its length is slightly shorter than the cantilever beam 1; the cantilever beam 1 is fixed on the side plate 5, the left end is fixed and the right end is free, and the upper surface of the cantilever beam 1 A layer of gold metal layer 6 is plated, the left end of the gold metal layer 6 is connec...
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