A mems micromirror sensor for direct measurement of high-voltage electrostatic voltage

Abstract

The invention discloses a MEMS micromirror sensor for direct measurement of high-voltage electrostatic voltage, including a MEMS micromirror and a PCB board, wherein the MEMS micromirror includes a base, a micromirror and a cover, wherein the PCB board, the base, the The micromirror and cover are distributed sequentially from bottom to top, and the PCB board is provided with metal leads, the base is provided with conductive columns, the micromirror is provided with metal cantilever, one end of the optical fiber is connected with the light transmitter / receiver, and the optical fiber The other end of the fiber optic probe is connected to the fiber optic probe through the cover, the fiber optic probe is facing the metal cantilever, one end of the metal lead is connected to the high-voltage electrified body to be tested, and the other end of the metal lead is electrically connected to the conductive column, which is located on the metal cantilever. Directly below the cantilever, the sensor can directly measure the high-voltage electrostatic voltage of the high-voltage electrified body, and has the characteristics of simple structure, low cost and small volume.

Description

technical field [0001] The invention relates to a MEMS micromirror sensor, in particular to a MEMS micromirror sensor used for direct measurement of high-voltage electrostatic voltage. Background technique [0002] High-voltage power capacitors are widely used in power systems and test stations. Because the charge stored in capacitors is in a static state, it is difficult to be sensed by general measurement methods, including electromagnetic induction, magnetic field measurement and other principles and methods. At present, it is used for high-voltage electrostatic induction The devices and products tested, including rotating vane type and vibrating capacitive electrostatic measuring devices, are technically and economically difficult to apply to high-voltage capacitors equipped in large quantities in the power sector due to their volume, large power consumption, and high cost. Therefore, Every year, personal injury and death accidents caused by the invisibility of capacitor...

AI Technical Summary

Problems solved by technology

However, in the electrostatic field, the electric field cannot provide continuous energy to the sensor, and the charge on the high-voltage conductor cannot continue to maintain macroscopic motion. This has become a difficult point in the measurement of the electrostatic field, making the current electric field sensor less sensitive to low-frequency or electrostatic fields.

At the same time, the current sensors that can be used to measure high-voltage electrostatic fields have disadvantages such as complex structure, large volume, and high cost, and cannot be mass-produced

During the operation of the power system or electrical laboratory, a large number of non-contact indirect measuring instruments are required to monitor the accident-prone points of the high-voltage electrified body on-line to ensure the safety of operators and electronic equipment. Therefore, the existing electric field Sensors cannot meet this requirement

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