Ultrahigh-resolution imaging optical system and imaging method of submicron pixels
An ultra-high-resolution, sub-micron-level technology, applied in the field of optical design, can solve the problems of large focal length and difficult to meet, so as to improve manufacturability, reduce the difficulty of focusing, and ensure the effect of integration performance
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[0033] An ultra-high resolution imaging optical system with submicron pixels, such as figure 1 As shown, it includes a first aspheric correction mirror 1, a second aspheric correction mirror 2, a folding mirror 3, a main reflector 4, a field lens 5, and an imaging image surface 6. The first aspheric correction mirror 1, the second aspheric correction mirror Two aspheric correction mirrors 2 are arranged side by side on the incident light path to form a correction mirror group, and the folding mirror 3 is arranged on the rear side of the correction mirror group and is inclined at a certain angle to the vertical direction of the incident light path. The field mirror 5 is installed on the rear side of the through hole position, and the installation position of the main reflector 4 is adjusted according to the turning angle of the turning mirror 3 and the distance between the center of curvature of the main reflecting mirror 4 and the center position of the turning mirror 3 to ensu...
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