Module loading device with cleaning function

A loading device and function technology, applied in cleaning methods and utensils, cleaning methods using gas flow, chemical instruments and methods, etc., to achieve the effects of improving practicability, realizing dust removal, and simple operation

Inactive Publication Date: 2018-11-23
程梦轩
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] At present, there is a cost problem in replacing all the existing load ports with load ports equipped with such a purge function, and there are many types of wafer cassettes, so when changing the type of wafer cassette, it is necessary to install a corresponding load port separately The problem

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  • Module loading device with cleaning function
  • Module loading device with cleaning function

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Embodiment Construction

[0024] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0025] see Figure 1-2, the present invention provides a technical solution for a module loading device with a cleaning function: its structure includes a wafer box shell 1, a module loading box 2, a debris suction cleaning box 3, and a blower box 4, and the wafer box shell 1 passes through Bolts are connected by riveting to the outer surfaces of the debris suction and cleaning box 3 and the blower blower box 4, the module loading box 2 is embedded between the...

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Abstract

The invention discloses a module loading device with the cleaning function. The module loading device with the cleaning function structurally comprises a wafer box shell, a module loading box, an impurity pumping removal box and a purging air blower box. The impurity pumping removal box is provided with a pumping vacuum pump, a dust removal rotation device and a control transmission gear train. The purging air blower box is provided with an air supply control device, a circuit start trigger device and a control transmission motor. According to the module loading device with the cleaning function, the effect of removing dust is achieved by driving the pumping vacuum pump and the air supply control device to work, it is not needed that a loading port is installed in addition, and insurance and safety are achieved; and meanwhile, because a trigger press plate is arranged at the bottom of a limiting block in a locking manner, when the wafer box shell is accidentally put upside down, purification on air in the module loading box is not influenced, and the practicability of the device is improved.

Description

technical field [0001] The invention relates to the field of wafer box purging modules, in particular to a module loading device with cleaning function. Background technique [0002] In general, semiconductor elements are obtained by depositing and patterning various substances in the form of thin films on a wafer as a substrate. To this end, various processes such as deposition process, etching process, purging process, and drying process are required. [0003] To perform these steps, devices for transferring wafers are widely used. Among them, a load port is commonly used to supply wafers loaded in a wafer cassette to a semiconductor transfer device. [0004] In addition, if there are foreign objects inside the wafer cassette, it will cause defective wafers, so gas purge is used to remove foreign objects. The initial load port model does not have this purge function, but the newly developed load port adds nitrogen N2 purge function to solve these problems. [0005] At p...

Claims

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Application Information

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IPC IPC(8): B08B5/04B08B7/00B08B13/00
CPCB08B5/04B08B7/0028B08B13/00
Inventor 程梦轩
Owner 程梦轩
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