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Photosensitive element, photoelectric sensing detection base plate and manufacturing method thereof

A technology for photosensitive elements and detection substrates, which is applied to electrical components, circuits, and electric solid-state devices, etc. It can solve the problems of small photocurrent, low light utilization rate, and difficulty in improving the signal-to-noise ratio of X-ray detection substrates, and achieve an increase in photocurrent , expand the area, improve the effect of signal-to-noise ratio

Active Publication Date: 2018-11-23
BOE TECH GRP CO LTD
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  • Claims
  • Application Information

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Problems solved by technology

However, the light utilization rate of existing photodiodes is low, so the photocurrent is small, making it difficult to improve the signal-to-noise ratio of the X-ray detection substrate

Method used

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  • Photosensitive element, photoelectric sensing detection base plate and manufacturing method thereof
  • Photosensitive element, photoelectric sensing detection base plate and manufacturing method thereof
  • Photosensitive element, photoelectric sensing detection base plate and manufacturing method thereof

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Embodiment Construction

[0055] Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments may, however, be embodied in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of example embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and thus their detailed descriptions will be omitted.

[0056] Although relative terms such as "upper" and "lower" are used in this specification to describe the relative relationship of one component of an icon to another component, these terms are used in this specification only for convenience, for example, according to the description in the accompanying drawings directions for the example described above. It will be appreciated that if the illustrated device is turned over so...

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Abstract

The invention discloses a photosensitive element, a photoelectric sensing detection base plate and a manufacturing method of the photoelectric sensing detection base plate, and relates to the technical field of photoelectric. The photosensitive element comprises a first electrode layer, a photoelectric conversion layer, a second electrode layer, an insulating layer, and a third electrode layer. The photoelectric conversion layer is arranged on the first electrode layer. The second electrode layer is arranged on the surface, away from the first electrode layer, of the photoelectric conversion layer. The side surface of the photoelectric conversion layer and at least part of the surface, away from the photoelectric conversion layer, of the second electrode layer are covered with the insulating layer, and the insulating layer is made of transparent material. The insulating layer is covered with the third electrode layer, and the third electrode layer is used for reflecting at least part of the light entering the insulating layer to the side surface of the photoelectric conversion layer. The photosensitive element can improve photocurrent and improve the signal-to-noise ratio of the photoelectric sensing detection base plate.

Description

technical field [0001] The present disclosure relates to the field of optoelectronic technology, in particular, to a photosensitive element, a photoelectric sensing detection substrate and a method for manufacturing the photoelectric sensing detection substrate. Background technique [0002] X-ray detection device is a commonly used indirect conversion photoelectric detection device, which is usually used in medical treatment, industrial production and other fields. Among them, the X-ray detection substrate is its core component. At present, the X-ray detection substrate generally includes photodiodes, thin film transistors (Thin Film Transistor, TFT), etc. Visible light can be converted into electrical signals through photodiodes, and thin film transistors can receive electrical signals. And output the electrical signal to display the image. However, the light utilization rate of existing photodiodes is low, so that the photocurrent is small, making it difficult to improve...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/105H01L31/0224H01L31/0232H01L27/146
CPCH01L27/14663H01L27/14683H01L31/022408H01L31/02327H01L31/1055H01L27/14629H01L27/14685H01L31/02161H01L27/14603H01L27/14612H01L27/1464H01L27/14692H01L31/02005
Inventor 黄睿
Owner BOE TECH GRP CO LTD
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