A method for enhancing the connection strength between ceramic sheet and surface electrode layer in piezoelectric ceramic sheet
A piezoelectric ceramic sheet and surface electrode technology, applied in the field of piezoelectric ceramics, can solve the problem of weak connection with the metal layer, and achieve the effects of improving the interface connection strength, tensile strength, and contact area.
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Embodiment 1
[0044] The upper and lower surfaces of a piezoelectric ceramic sheet with a thickness of 1.5 mm are cleaned after being grooved, and the copper electrode layer (surface electrode layer) is plated. The groove depth is 0.1 mm, the groove width is 0.5 mm, and the groove spacing is about 0.5 mm. Wherein, the preparation method of the copper electrode layer is sputtering and evaporation, and the thickness of the copper electrode layer is 0.8 μm. Sputtering is a type of physical vapor deposition. It introduces a magnetic field on the surface of the target cathode (copper, silver, etc.), and uses the magnetic field to confine the charged particles to increase the plasma density to increase the sputtering rate. The electrode metal layer (copper, silver, etc.) is prepared on a single crystal, etc., to obtain a piezoelectric ceramic sheet with grooves distributed on the surface. Then, the piezoelectric ceramic sheets without grooves (with copper electrodes on the upper and lower surfaces...
Embodiment 2
[0054] The upper and lower surfaces of the piezoelectric ceramic sheet with a thickness of 1.5mm are cut and cleaned, and the silver electrode layer (surface electrode layer) is plated. The groove depth is 0.15mm, the groove width is 0.4mm, and the groove spacing is about 0.4mm. Wherein, the preparation method of the silver electrode layer is sputtering evaporation, the thickness of the silver electrode layer is about 0.8 μm, and the piezoelectric ceramic sheet with grooves distributed on the surface is obtained. The piezoceramic sheet without grooves (with silver electrodes on the upper and lower surfaces and a thickness of 0.8μm) and 6 piezoelectric ceramic sheets with grooves on the surface were compared for the tensile test of the silver electrode metal layer (see Table 3).
[0055] Put the above uncut groove ( image 3 ), grooved ( Figure 4 ) Two kinds of piezoelectric ceramic sheets were screen-printed with phenolic resin adhesive, and 10 sheets each were bonded together in...
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