Terahertz confocal microscopic imaging system and imaging method thereof

Abstract

The invention provides a terahertz confocal microscopic imaging system. The terahertz confocal microscopic imaging system comprises a light source module, a data acquisition module, a data processingand image restoration module, an objective table module, an optical path transmission module and a spatial filtering module, wherein the objective table module is used for carrying, rotating and translating an object to be imaged, and sending the rotating translation two-dimensional information of the object to be imaged to the data processing and image restoration module; the optical path transmission module is used for transmitting terahertz beams to the data acquisition module along an optical path, the optical path is provided with two focal points, and the optical path penetrates throughthe object to be imaged; and the spatial filtering module comprises pinholes correspondingly disposed at the two focal points. The invention further provides an imaging method of the terahertz confocal microscopic imaging system. The terahertz confocal microscopic imaging system avoids the use of a beam splitting sheet, reduces energy loss, improves the imaging signal-to-noise ratio, and can realize rapid imaging of hidden objects; and in addition, the sub-millimeter pinholes are used for spatially filtering the terahertz beam, the transverse and longitudinal resolution ratio of imaging is improved, and finally the slice image of the object can be obtained.

Description

technical field [0001] The invention belongs to the technical field of terahertz applications, and in particular relates to a terahertz confocal microscopic imaging system and an imaging method thereof. Background technique [0002] THz (terahertz) imaging is one of the important application directions of THz technology. In 1995, B.B.Hu and M.C.Nuss used the THz time-domain spectroscopy system to realize the scanning imaging of fresh leaves and integrated circuits. This work is regarded as the field of THz imaging The intuitive and clear transmission scanning images proved the great potential of THz waves in the field of imaging. In particular, the imaging potential of THz QCL developed from infrared quantum cascade laser (Quantum cascade laser, QCL) has also attracted widespread attention. The device has high output power, good single frequency, small size and easy integration. As a THz source, it is adopted by various imaging techniques and systems. [0003] THz waves ar...

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Problems solved by technology

[0007] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a terahertz confocal microscopic imaging system and its imaging method to solve the problem of low image resolution, inability to achieve slice imaging and slow imaging speed in existing imaging systems. The problem

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