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Differential structure light illumination microscopic measurement method for three-dimensional dynamic real-time measurement of micro-nano structure

A structured light illumination and real-time measurement technology, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of complex signal processing, large errors, low efficiency, etc., and achieve the effect of wide applicability

Inactive Publication Date: 2018-12-07
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

At present, the micro-measurement methods based on structured illumination use phase shifting combined with vertical scanning to obtain the image modulation degree curve, which is not only inefficient, complex signal processing, but also has large errors, which is not conducive to real-time dynamic detection.

Method used

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  • Differential structure light illumination microscopic measurement method for three-dimensional dynamic real-time measurement of micro-nano structure
  • Differential structure light illumination microscopic measurement method for three-dimensional dynamic real-time measurement of micro-nano structure
  • Differential structure light illumination microscopic measurement method for three-dimensional dynamic real-time measurement of micro-nano structure

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Embodiment Construction

[0025] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in combination with specific examples and with reference to the accompanying drawings.

[0026] Such as Figure 1-2 As shown, a differential structured illumination micro-measurement method for three-dimensional dynamic measurement of micro-nano structure, the method steps include:

[0027] Step S1: Use the host computer program to control the piezoelectric ceramic micro-step to vertically scan the standard plane object, scan each step, use the DMD to project the sinusoidal grating fringe, use the differential dual CCD system to collect the deformed fringe pattern, and then convert it into a digital signal and store it in the computer.

[0028] Step S2: For each scan, for the fringe patterns collected by the first CCD 101 and the second CCD 105, use the wavelet transform algorithm to calculate the modulation va...

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Abstract

The invention discloses a differential structure light illumination microscopic measurement method for the three-dimensional dynamic real-time measurement of a micro-nano structure. A spatial light field is adjusted by DMD to generate a coded light field to be projected onto the surface of an object to be tested, a dual-CCD differential detection method is used, a CCD imaging detection branch witha small gap is introduced based on a single-channel CCD conjugate imaging detection, and the light intensity information of the coded light field is simultaneously collected. A wavelet transform algorithm is used to solve the modulation degree distribution of a dual-CCD system collection coded light field, far and near defocus double-path detection modulation degree distribution are subtracted from one another to obtain differential modulation distribution, a theoretical correlation model between modulation degree distribution and an object height is established by using a correlation theory,and the dynamic measurement of a three-dimensional micro-nano structure is achieved by calculating the linear response function of the modulation degree and height information. According to the method, mechanical scanning is not needed, the three-dimensional shape restoration can be achieved with only one map, and the method has the advantages of no contact, high precision, simple measurement system and the like.

Description

technical field [0001] The invention belongs to the technical field of optical measurement engineering, and specifically relates to a differential structured illumination micro-measurement method for three-dimensional dynamic real-time measurement of micro-nano structures. Background technique [0002] Micro-nano detection methods and technologies are important means to obtain microscopic information of substances. At the same time, the rapid operation of high-precision micro-nano detection technology is also the core basic guarantee for advanced micro-nano manufacturing technologies such as high-precision optical processing. Therefore, the development of three-dimensional micro-nano detection methods and technologies for real-time dynamic measurement of modern three-dimensional micro-nano structures is a further development of three-dimensional detection, which not only obtains the morphology information of micro structures, but also greatly improves the efficiency of produ...

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Application Information

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IPC IPC(8): G01B11/25
CPCG01B11/2518
Inventor 谢仲业唐燕杨可君刘锡赵立新胡松
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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