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Structured illumination microscopic measurement method for detection of multi-layer complex micro-nano structures

A technology of structured light illumination and microscopic measurement, applied in measurement devices, optical devices, instruments, etc., can solve the problems of large data processing capacity and low detection efficiency, and achieve a simple system structure, improved accuracy, and high efficiency. Effect

Active Publication Date: 2020-07-10
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

This method is currently the main method for surface rough microstructure detection. However, this method belongs to the point-by-point measurement method. For surface measurement, horizontal image stitching and vertical scanning are required continuously. The amount of data processing is large and the detection efficiency is low.

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  • Structured illumination microscopic measurement method for detection of multi-layer complex micro-nano structures
  • Structured illumination microscopic measurement method for detection of multi-layer complex micro-nano structures
  • Structured illumination microscopic measurement method for detection of multi-layer complex micro-nano structures

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Embodiment Construction

[0026] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in combination with specific examples and with reference to the accompanying drawings.

[0027] like Figure 4 Shown, a kind of structured illumination micro-measurement method for the detection of multi-layer complex micro-nano structure, the method steps include:

[0028] Step S1: Use the host computer program to control the piezoelectric ceramic micro-step to vertically scan the object to be tested. For each step of scanning, use the DMD to project eight sinusoidal grating stripes with a phase difference of π / 4 in sequence, and use the CCD to collect the reflection of each layer of the structure The image is then converted into a digital signal and stored in the computer;

[0029] Step S2: For each scan, use two-dimensional Fourier transform and phase shift algorithm to analyze the distribution of the modula...

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Abstract

The invention discloses a structured light illumination microscopic measurement method for multi-layer micro-nano structure detection. According to the method, a digital micromirror array (DMD) is adopted to generate a coded light field, and the coded light field is projected onto the surface of an object to be measured; a CCD is adopted to collect the reflected light intensity information of eachlayer structure; a phase shift algorithm and a two-dimensional Fourier transform algorithm are combined so as to perform analysis to obtain the modulation degree distribution of an acquired image; apiezoelectric ceramic (PZT) is adopted to vertically scan the object to be measured, so that modulation degree curves corresponding to each pixel point are obtained; and the peak values of the modulation degree curves are extracted, so that the shape detection of the multilayer micro-nano structure can be realized. With the method adopted, the influence of noises on the extraction of the peak values can be suppressed effectively, and the shape information of the object to be measured can be retained. The method has the advantages of simple measurement system, wide measurement range and small interference between the signals of a plurality of layers of structures.

Description

technical field [0001] The invention belongs to the technical field of optical measurement engineering, and in particular relates to a structured light visualization micro-measurement method for multi-layer micro-nano structure detection. Background technique [0002] Micro-devices based on multilayer micro-nano structures have great application prospects in aerospace, military, biomedical, semiconductor and other fields, and their wide use has greatly promoted the development of related sciences. And performance testing, etc. are inseparable from the corresponding three-dimensional detection technology. [0003] Optical measurement method is the most important method in non-destructive testing of microstructures, and plays an important role in microstructure testing. The typical optical detection methods that have been widely used are white light interference and confocal. The interferometry method reconstructs the shape distribution of the object to be measured by analyz...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24
CPCG01B11/24
Inventor 谢仲业唐燕杨可君刘锡赵立新胡松
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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