Inertial stick-slip type cross-scale motion platform

A motion platform and cross-scale technology, applied in the direction of generator/motor, piezoelectric effect/electrostrictive or magnetostrictive motor, electrical components, etc., can solve the problem of high manufacturing cost, complicated manufacturing process, and inability to cross-scale precision Positioning and other issues, to achieve the effect of low manufacturing cost, simple manufacturing process, and simple structure

Active Publication Date: 2018-12-07
SUZHOU UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Generally, the precision driving devices based on piezoelectric ceramics mainly include direct drive, lever amplification, ellipse amplification, diamond amplification and inchworm precision positioning platforms. However, the displacement of the first three precision positioning platforms above is limited to within a few hundred microns. , cannot achieve cross-scale precision positioning, and the structure of the inchworm precision positioning platform is relatively complex, resulting in complex manufacturing processes and high manufacturing costs

Method used

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  • Inertial stick-slip type cross-scale motion platform
  • Inertial stick-slip type cross-scale motion platform
  • Inertial stick-slip type cross-scale motion platform

Examples

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Embodiment 1

[0026] like figure 1 as shown, figure 1 Schematic diagram of the principle of inertial stick-slip drive. The inertial stick-slip drive system is composed of piezoelectric ceramics, motion components and inertial components. The left side of the figure is the voltage drive signal, and the right side is the motion of the corresponding inertial stick-slip drive system under the drive signal. In the early stage of movement, the driving voltage increases rapidly, and the piezoelectric ceramics elongates rapidly, so that the moving component and the inertial component produce different micro-displacements in opposite directions, and the micro-displacement of the inertial component is △X; when the voltage reaches a certain value , the voltage drops slowly, the piezoelectric ceramic gradually shortens, the inertial component remains in place under the action of friction, and the moving component moves toward the direction of the inertial component. In this way, within one driving cy...

Embodiment 2

[0036] You can also refer to the appended figure 1 , attached figure 2 And attached image 3The difference between the inertial stick-slip cross-scale motion platform of the second embodiment and the first embodiment is only that a ball is arranged between the elastic arm and the side wall of the protective seat 7, and the ball is arranged on the elastic arm. In the groove 13, the frictional force generated by the contact between the elastic arm and the side wall of the protective seat 7 is a point frictional force, which further reduces the frictional force.

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Abstract

The invention discloses an inertial stick-slip type cross-scale motion platform, the platform comprises a protection base and a motion mechanism arranged in the protection base, wherein the motion mechanism comprises a piezoelectric ceramic, a motion assembly and an inertia assembly, the motion assembly comprises a motion transmission component and a motion output component connected to the motiontransmission component; the inertia assembly comprises an inertia transmission component and a friction component connected to the inertia transmission component; the piezoelectric ceramic is provided with a first end and a second end which are arranged opposite to each other, the first end is in contact with the motion transmission component, the second end is in contact with the inertia transmission component, the motion transmission component and the inertia transmission component are connected by means of an elastic deformation component, and a cross ball guide rail used for guiding the motion output component is arranged on the protection base, and the friction force between the motion output component and the cross ball guide rail is less than the friction force generated by the contact between the friction component and the protection base. The inertial stick-slip type cross-scale motion platform is simple in structure, simple in manufacturing process, and low in manufacturingcost, and can realize cross-scale precise positioning.

Description

technical field [0001] The invention relates to an inertia stick-slip cross-scale motion platform, which belongs to the technical field of precision motion. Background technique [0002] With the rapid development of micro / nano technology, there is an urgent need for sub / micron, micro / Nanoscale ultra-precise drive mechanism. [0003] The cross-scale precision motion technology with micron-level motion resolution and millimeter-level motion travel is the key technology in the field of micro-drives. Compared with other types of cross-scale motion driving methods, inertial stick-slip drive has simple driving principle, convenience, and simple control, and has the advantages of large motion range, high resolution, simple structure, easy miniaturization, and precise positioning. Therefore, inertial stick-slip drive It is a method that is widely used in the current cross-scale driving. The working principle of the inertial stick-slip drive is mainly to use the friction force a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N2/02
CPCH02N2/025
Inventor 钟博文朱杰王振华孙立宁
Owner SUZHOU UNIV
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