Inertial stick-slip type cross-scale motion platform

A motion platform and cross-scale technology, applied in the direction of generator/motor, piezoelectric effect/electrostrictive or magnetostrictive motor, electrical components, etc., can solve the problem of high manufacturing cost, complicated manufacturing process, and inability to cross-scale precision Positioning and other issues, to achieve the effect of low manufacturing cost, simple manufacturing process, and simple structure
CN108964512AActive Publication Date: 2018-12-07SUZHOU UNIV
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Patent Information

Authority / Receiving Office
CN ยท China
Patent Type
Applications(China)
Current Assignee / Owner
SUZHOU UNIV
Publication Date
2018-12-07

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Abstract

The invention discloses an inertial stick-slip type cross-scale motion platform, the platform comprises a protection base and a motion mechanism arranged in the protection base, wherein the motion mechanism comprises a piezoelectric ceramic, a motion assembly and an inertia assembly, the motion assembly comprises a motion transmission component and a motion output component connected to the motiontransmission component; the inertia assembly comprises an inertia transmission component and a friction component connected to the inertia transmission component; the piezoelectric ceramic is provided with a first end and a second end which are arranged opposite to each other, the first end is in contact with the motion transmission component, the second end is in contact with the inertia transmission component, the motion transmission component and the inertia transmission component are connected by means of an elastic deformation component, and a cross ball guide rail used for guiding the motion output component is arranged on the protection base, and the friction force between the motion output component and the cross ball guide rail is less than the friction force generated by the contact between the friction component and the protection base. The inertial stick-slip type cross-scale motion platform is simple in structure, simple in manufacturing process, and low in manufacturingcost, and can realize cross-scale precise positioning.
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Description

technical field

[0001] The invention relates to an inertia stick-slip cross-scale motion platform, which belongs to the technical field of precision motion. Background technique

[0002] With the rapid development of micro / nano technology, there is an urgent need for sub / micron, micro / Nanoscale ultra-precise drive mechanism.

[0003] The cross-scale precision motion technology with micron-level motion resolution and millimeter-level motion travel is the key technology in the field of micro-drives. Compared with other types of cross-scale motion driving methods, inertial stick-slip drive has simple driving principle, convenience, and simple control, and has the advantages of large motion range, high resolution, simple structure, easy miniaturization, and precise positioning. Therefore, inertial stick-slip drive It is a method that is widely used in the current cross-scale driving. The working principle of the inertial stick-slip drive is mainly to use the friction force a...

Claims

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