Vacuum coating machine for preparing large-caliber optical thin film element
A vacuum coating machine and optical thin film technology, applied in vacuum evaporation coating, sputter coating, ion implantation coating, etc., can solve the problem of the increase of vacuum coating chamber volume, the increase of high vacuum coating environment cost, and the consumption of optical thin film raw materials. Increase and other problems to achieve the effect of optimizing thickness distribution, optimizing thickness distribution uniformity, and improving spectral uniformity
Active Publication Date: 2018-12-18
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology
The volume of the vacuum coating chamber configured in this way will increase sharply, and the cost of obtaining a high vacuum coating environment will increase significantly. In addition, the consumption of optical thin film raw materials will inevitably increase. At the same time, the difficulty of vacuum coating machine preparation and daily maintenance will also increase.
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[0018] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0019] Such as figure 1 As shown, the embodiment of the present invention includes: a vacuum module 1 , an evaporation source module 2 , a film thickness / velocity monitoring module 3 , a temperature control module 4 and a specially configured planetary rotary fixture module 5 . Among them, the vacuum module 1 is connected to the vacuum coating chamber 6 through a vacuum pipeline to realize coating in a vacuum environment; the evaporation source module 2 is located at the bottom of the vacuum coating chamber 6 to realize thermal evaporation coating of thin film materials; the film thickness / speed monitoring module 3 is located in the vacuum coating chamber Inside 6, it realizes the film process parameter control during vacuum coating; the temperature control module 4 is in the vacuum coating chamber 6, and realizes the temperature monitoring of ...
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The invention discloses a vacuum coating machine for preparing a large-caliber optical thin film element, and belongs to the field of thin film optics. Compared with a conventional vacuum coating machine, The vacuum coating machine comprises a vacuum module, an evaporation source module, a film thickness / speed monitoring module and a temperature control module, and further comprises a planetary rotary clamp module with a special design; and the vacuum coating machine is characterized in that the revolution radius of a planetary rotary clamp is adjustable, and a large-caliber optical thin filmelement with the size larger than the radius of a vacuum coating chamber can be manufactured. In addition, a correction baffle module is arranged between the evaporation source module and the large-caliber optical film element, and the thickness distribution of a thin film on the large-caliber optical thin film element in the vacuum coating process is optimized. The vacuum coating machine is particularly suitable for preparing large-caliber optical thin film element with the size larger than the radius of the vacuum coating chamber, and the preparation of the large-caliber optical thin film element cannot be realized by the conventional vacuum coating machine.
Description
technical field [0001] The invention relates to the technical field of vacuum coating machines, in particular to a vacuum coating machine for preparing large-diameter optical thin film elements. Background technique [0002] With the development of science and technology, the design of optical system is becoming more and more sophisticated, and the aperture of optical components is also getting larger. Usually, a specially designed optical film must be coated on the surface of the large aperture optical element to improve the performance of the optical element to meet the performance requirements of the optical system. Vacuum coating technology has the characteristics of simplicity, convenience, easy operation, fast film forming speed, and high film quality. It is the most widely used technology in the preparation of optical thin films. [0003] For the preparation of large-diameter optical thin film components, domestic and foreign vacuum coating machines are mainly equipp...
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IPC IPC(8): C23C14/24C23C14/50C23C14/54
CPCC23C14/24C23C14/505C23C14/542
Inventor 郭春孔明东
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI