Preparation method for array F-P (Fabry-Perot) cavity optical filter

A F-P and optical filter technology, applied in the direction of optical filters, optics, optical components, etc., can solve the problems of low transmittance at the center wavelength of the filter and inaccurate position of the center wavelength, etc., to achieve precise control and accurate position High performance and high central transmittance

Pending Publication Date: 2018-12-18
XIAN TECHNOLOGICAL UNIV
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Problems solved by technology

[0010] The present invention provides a preparation method of an array F-P cavity filter to overcome the problems of

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  • Preparation method for array F-P (Fabry-Perot) cavity optical filter
  • Preparation method for array F-P (Fabry-Perot) cavity optical filter
  • Preparation method for array F-P (Fabry-Perot) cavity optical filter

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Embodiment Construction

[0025] The following will be combined with figure 1 The present invention will be described in detail with Examples.

[0026] Preparation: the equipment used in the method of the present invention is a conventional equipment, first through ultrasonic cleaning on the zinc sulfide substrate, put into a vacuum chamber, and the local vacuum reaches 3 × 10 -3 Pa, turn on the ion beam evaporation source, the evaporation rate is 4A / s, the evaporation temperature is 230°, alternately deposit SiO 2 and three layers of Ge each, with a thickness of one-tenth of the wavelength; then deposit a cavity layer with a thickness of one-half, and the material of the cavity layer is SiO 2 .

[0027] A method for preparing an array F-P cavity filter provided by the invention comprises the following steps:

[0028] 1. Manufacture of soft mold: The hard mold is prepared by single-point diamond turning, and the thickness of the cavity layer is adjusted according to the mold pattern according to the...

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Abstract

The invention relates to a preparation method for an array F-P (Fabry-Perot) cavity optical filter. The preparation method comprises the following steps that: (1) manufacturing a soft module; (2) manufacturing a lower reflecting film stack: on a substrate, adopting a thermal evaporation plating method to prepare the reflecting film stack and a cavity layer on one side of the F-P narrow band optical filter; (3) manufacturing a sacrificial layer: carrying out the spin coating of a sacrificial glue layer on the cavity layer; (4) carrying out pattern transfer: transferring the soft module patternprepared in (1) to the sacrificial layer prepared in (3) through a natural pressurization form; (5) regulating and controlling cavity layer thickness: adopting an ion beam etching technology to transfer the pattern of the sacrificial layer to the cavity layer to finish the regulation of multi-channel cavity layer thickness in one time; and (6) manufacturing an upper reflecting film stack: adoptinga thermal evaporation method to prepare the top reflecting film stack to finish manufacturing the optical filter. By use of the method, the problems of low transmittance and inaccurate position of the center wavelength of the optical filter in the prior art are overcome.

Description

Technical field: [0001] The invention relates to the technical field of designing optical components, and in particular relates to a method for preparing an array F-P cavity filter. Background technique: [0002] The main function of the optical filter is to filter light, allowing wavelength light within a certain narrow wavelength range to pass through, while others are cut off. It is mainly used in various spectral cameras, etc. At present, the design and manufacturing process of a single F-P cavity filter is very mature, and the development of an arrayed filter is also slowly developing at home and abroad. The preparation of arrayed filters includes preparation methods, film system design, and structural design. The process involves many fields such as thin-film optics and micro-optics, and is a relatively complicated problem. The main development process and phased results are shown in Table 1: [0003] Table 1 The development history and phased achievements of array f...

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Application Information

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IPC IPC(8): G02B5/20
CPCG02B5/201
Inventor 梁海锋殷淑静蔡长龙段营部刘卫国
Owner XIAN TECHNOLOGICAL UNIV
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