Laser scribing machine and evaluation method of process capability of laser scribing machine
Patent Information
- Authority / Receiving Office
- CN Β· China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- BEIJING APOLLO DING RONG SOLAR TECH
- Publication Date
- 2019-01-04
- Estimated Expiration
- Not applicable Β· inactive patent
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Abstract
Description
technical field
[0001] The present application relates to the field of process equipment, in particular to a laser scribing machine and an evaluation method for its process capability. Background technique
[0002] Photovoltaic technology is a technology that can directly convert solar energy into electrical energy. The development of photovoltaic technology is also affected and promoted by various factors in society. At present, a laser scribing machine is often used in the preparation of solar cells to scribe the substrate or each film layer. The monitoring of the laser beam power of the laser marking machine needs to be measured by an offline detection module. The detection method for the focal length of the laser beam of the laser marking machine is usually to judge the influence of changing the focal length of the laser beam on the graphics under the condition of fixed energy.
[0003] In the traditional energy detection method, when there is a problem with the energy...