A high-precision direct-write vacuum coating device and method
A vacuum coating and direct writing technology, which is applied in the directions of vacuum evaporation coating, sputtering coating, ion implantation coating, etc., can solve the problems that the coating accuracy cannot be guaranteed, and the film layers with different forms and characteristics cannot be processed, and the thickness can be achieved. Fully controllable, effect of eliminating motion following error
Active Publication Date: 2020-01-24
SHANDONG UNIV
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Problems solved by technology
Most of the vacuum coating devices are mostly used for large-scale coatings, and the coating accuracy cannot be guaranteed; the existing vacuum coating devices that can process nano-scale precision can only coat the surface of the substrate, and cannot process different forms. characteristic layer
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[0046] It should be pointed out that the following detailed description is exemplary and intended to provide further explanation to the present application. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.
[0047] It should be noted that the terminology used here is only for describing specific implementations, and is not intended to limit the exemplary implementations according to the present application. As used herein, unless the context clearly dictates otherwise, the singular is intended to include the plural, and it should also be understood that when the terms "comprising" and / or "comprising" are used in this specification, they mean There are features, steps, operations, means, components and / or combinations thereof.
[0048] As introduced in the background technology, there are deficiencies in the prior art. In order to solve th...
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The invention discloses high-precision direct writing type vacuum coating equipment and a method and aims at solving the problems that the coating precision cannot be ensured and coating characteristics are relatively onefold in the prior art. The high-precision direct writing type vacuum coating equipment has the beneficial effects of meeting the characteristics of high precision, microscale andthe like in the coating process. The invention adopts the scheme that the high-precision direct writing type vacuum coating equipment comprises a mask base, a micro-positioning platform and a substrate fixture, wherein the mask base is provided with a through hole; the micro-positioning platform is provided with a through groove and supported on the end face of the mask base; a substrate is arranged at the end part of the substrate fixture; the substrate fixture is partially clamped in the through groove; the substrate is arranged towards the through hole; the substrate fixture and the substrate are driven by the micro-positioning platform to do micro motion in a set plane; a target enters through the mask hole and further is deposited on the surface of the substrate.
Description
technical field [0001] The invention relates to a high-precision vacuum coating device, in particular to a high-precision direct-writing vacuum coating device and method. Background technique [0002] Vacuum coating is a method of end-face coating processing. Its principle is to heat solid materials in a high-vacuum environment, sublimate or evaporate them, and deposit them on a specific substrate to achieve metallization deposition. It can realize material atoms from source materials to Controlled transfer of thin films. As a new type of additive manufacturing process, vacuum coating can obtain a film layer with good film / substrate bonding force, uniform film density, controllable film thickness, stable film composition and nanoscale resolution of film width. [0003] Existing vacuum coating devices have great limitations. Most of the vacuum coating devices are mostly used for large-scale coatings, and the coating accuracy cannot be guaranteed; the existing vacuum coating...
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IPC IPC(8): C23C14/30C23C14/04C23C14/50
CPCC23C14/042C23C14/30C23C14/50
Inventor 闫鹏岳宗仰
Owner SHANDONG UNIV