Polycrystalline silicon ingot furnace for reducing usage amount of high purity argon
A technique for polysilicon ingot casting furnace and usage, which is applied in the direction of polycrystalline material growth, crystal growth, chemical instruments and methods, etc., can solve the problems of increasing ingot cost, excessive argon gas, poor ingot quality, etc. Quantity, low ingot cost, good quality effect
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[0019] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.
[0020] Such as figure 1 As shown, the polysilicon ingot furnace for reducing the consumption of high-purity argon gas comprises a furnace body 1, and a heat insulating support plate 3 arranged horizontally through a plurality of support columns 2 in the furnace body 1, and a heat insulating support plate 3 is provided on the heat insulating support plate 3 A ring-shaped heat preservation cover 4 is arranged in a ring shape, and a crucible 5 arranged on the heat insulating support plate 3 is arranged on the inner side of the ring heat preservation cover 4, and a heater 6 corresponding to the crucible 5 is provided on the outer side of the ring heat preservation cover 4, The upper end of the furnace body 1 is provided with an argon gas inlet 11, the lower end is provided with a number of argon gas outlets 12, the upper end of the annula...
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