Magnetically controlled variable-rigidity micro-nano measuring head of layered structure

Abstract

The invention relates to the technical field of micro workpiece surface feature equipment, in particular to a magnetically controlled variable-rigidity micro-nano measuring head of a layered structure. By the design of a measuring head layered structure and an electromagnetic system, adjustable rigidity of a measuring head system can be achieved; the rigidity of the measuring head system is adjusted by independently controlling a current of a cylindrical magnetic coil winding, so as to implement isotropic rigidity of the measuring head system; a rubber gasket has certain micro deformation capacity, so that a clearance between the magnetic coil winding and a cylindrical permanent magnet can be adjusted, and an installation error can be adjusted and compensated; by adoption of upper and lower end covers of equilateral triangle connector structures, an enough installation operation space is provided; and furthermore, the measuring head is uniform in stress, relatively high in rigidity, stable in structure and high in robustness.

Description

technical field [0001] The invention relates to the technical field of micro-workpiece surface feature equipment, in particular to a layered structure magnetron variable stiffness micro-nano measuring head. Background technique [0002] With the rapid development of microsystem technology, many miniature precision measuring instruments have emerged. The surface size accuracy of these instruments is generally at the micron level, and some even require at the nanometer level. [0003] When the electromagnetic layered variable stiffness micro-nano probe is measuring the surface characteristics of the micro-workpiece, the measuring ball on the top of the stepped measuring rod is in contact with the surface of the workpiece to be measured, and the contact force acts on the center body along the measuring rod, causing it to deform, so that it is in contact with the center The sensitive elastic beam connected to the body produces a small deformation, which triggers the strain senso...

AI Technical Summary

Problems solved by technology

[0005] 1. The stiffness of the measuring head is fixed and cannot be adjusted, so it is difficult to achieve isotropic stiffness;

[0006] 2. Using a measuring head with a relatively large rigidity, the contact force required to trigger the sensor is greater during the measurement process, and it is easy to scratch the surface of the workpiece to be measured;

[0007] 3. Using a small rigidity measuring head, the dynamic response becomes slow, the resonance frequency is low, and the stability is poor;

[0008] 4. The inertial force generated when the probe quickly approaches or moves away from the workpiece under test may cause false triggering;

[0009] 5. The van der Waals force between the measuring ball and the workpiece will cause potential damage to the suspension system of the measuring head;

[0010] 6. The existing pressure rod type variable stiffness probe is prone to center deviation of the measuring rod

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