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Thermal expansion type fluid triaxial accelerometer and processing method thereof

A thermal expansion, axial acceleration technology, applied in the field of inertial measurement, can solve the problems of the inability to improve the sensitivity of thermal convection accelerometers, limit the application of thermal accelerometers, and be easily affected by the external environment. Strong impact effect

Pending Publication Date: 2019-01-18
朴然
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Previously, accelerometers made using the principle of thermal convection had low sensitivity and were easily affected by the external environment due to the slow flow rate of thermal convective gas and the dependence on the acceleration of gravity g
The above two factors lead to the inability to improve the sensitivity of thermal convective accelerometers, which limits the application of thermal convective accelerometers

Method used

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  • Thermal expansion type fluid triaxial accelerometer and processing method thereof
  • Thermal expansion type fluid triaxial accelerometer and processing method thereof
  • Thermal expansion type fluid triaxial accelerometer and processing method thereof

Examples

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Effect test

Embodiment 1

[0043] refer to Figure 1 to Figure 8 As shown, the thermal expansion fluid triaxial accelerometer in this embodiment includes an upper sealing layer 1 , a middle detection layer 2 and a lower sealing layer 5 . Among them, there is a square nesting (outer square structure 3 and inner square structure 4) on the middle detection layer 2 and metal resistance bridge thermal wires 10, 11, 12, 13 on the outer square structure 3 and on the inner square structure 4 Metal resistance bridge heating wires 6,7,8,9 and metal resistance bridge thermal wires 12,13. Inside the upper sealing layer 1 is an inner groove 16 , and inside the lower sealing layer 5 is an inner groove 17 . The upper sealing layer 1 and the lower sealing layer 5 isolate the gas in the airtight chamber from the outside, forming a sealed working environment.

[0044] Such as figure 2 , image 3 , Figure 4 As shown, there is a square nesting in the middle detection layer 2, including an outer square structure 3 an...

Embodiment 2

[0053] This embodiment also provides a processing method for the thermal expansion type fluid triaxial accelerometer according to Embodiment 1, which includes:

[0054] S1: Make an intermediate detection layer on the aluminum material to form an inner and outer square nest, and drill holes with the same diameter and height as the size of the insulator at the corresponding position of the square structure for installing the insulator terminal;

[0055] S2: Install gold-plated insulator terminals on 20 holes to suspend the heating wire of the metal resistance bridge and the thermal wire of the metal resistance bridge;

[0056] S3: Cut the lead wires of the metal resistance bridge thermosensitive wire insulator binding posts used to suspend and detect the acceleration of the X and Y axes to the same length as the lead wires used to suspend the heating wire insulator binding posts of the metal resistance bridge, so that X and Y can be detected The metal resistance bridge thermal w...

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Abstract

The invention relates to the technical field of the inertia measurement, and in particular relates to a thermal expansion type fluid triaxial accelerometer and a processing method thereof. The thermalexpansion type fluid triaxial accelerometer adopts a detection layer of a square nesting structure, the square nesting structure comprises an outer square structure and an inner square structure; aninsulator binding post and a metal resistance bridge thermosensitive wire suspended on the insulator binding post are arranged on the outer square structure; the insulator binding post and a metal resistance bridge heating wire and the metal resistance bridge thermosensitive wire respectively suspended on the insulator binding post are arranged on the inner square structure; an upper sealing layerand a lower sealing layer form a sealed cavity, and the simultaneous detection of the triaxial accelerometer can be realized by cooperating with the corresponding detection and processing signal circuit, thereby realizing the multi-degree-of-freedom measurement of the thermal expansion type fluid triaxial accelerometer. Furthermore, the accelerometer has the features of being simple in structure,convenient for manufacturing and assembling, low in cost, low in power consumption, strong in impact resistance and long in service life.

Description

technical field [0001] The invention relates to the technical field of inertial measurement, in particular to a thermal expansion fluid triaxial accelerometer and a processing method thereof. Background technique [0002] In the past few decades, micromechanical accelerometers with cantilever beams and solid masses as sensitive elements are prone to fracture or damage under high-speed external impacts, and the structure is prone to fatigue; moreover, in order to improve the sensitivity of this accelerometer, It is necessary to place the sensitive components in a vacuum environment and reduce the gas damping coefficient; this fabrication process is expensive and complicated. In contrast, using fluid as a sensitive element, the fabricated device can achieve the characteristics of simple structure, strong impact resistance, long life and low cost, and has excellent performance. Previously, accelerometers made using the principle of thermal convection had low sensitivity and we...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/12
CPCG01P15/122
Inventor 朴然
Owner 朴然
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