Cross-shaped push-pull flow micromechanical biaxial thin-film gyroscope

Abstract

The invention discloses a cross-shaped push-pull flow micromechanical biaxial thin-film gyroscope which comprises a sensitive layer and a cover plate, four pairs of heaters and four thermistors whichare of a cross-shaped structure are arranged on the upper surface of the sensitive layer, and a cross-shaped groove is etched in the lower surface of the sensitive layer; the pair of heaters and the thermistor form a measuring unit; the electrifying mode of the four pairs of heaters is periodic push-pull electrifying; and a groove is etched on the cover plate and is hermetically connected with theupper surface of the sensitive layer. According to the MEMS gyroscope based on the thermal expansion flow, push-pull type heat flow distributed in a cross shape is formed, the push-pull type heat flow is large in flow speed, stable in air flow state, high in gyroscope sensitivity and good in stability, simultaneous measurement of the spatial biaxial angular velocity can be achieved, and the MEMSgyroscope based on the thermal expansion flow has the very the high integration degree, and is small in size, low in power consumption and low in cost.

Description

Technical field [0001] The invention relates to the technical field of detecting angular velocity and posture parameters of a moving body by using a Coriolis force to deflect a heat flow sensitive body, in particular to a "cross"-shaped push-pull flow micro-mechanical biaxial film gyro. Background technique [0002] The miniature inertial sensors made with MEMS (Micro-Electro-Mechanical-System) technology have many advantages such as mass production, low cost, small size, and low power consumption. They are ideal products for medium and low precision miniature inertial sensors in the future . Gyroscopes and accelerometers are the core inertial sensors for carrier motion attitude measurement and control, while gyroscopes are sensors that are sensitive to angular parameters such as angular velocity and angular acceleration. The traditional miniature gyroscope (micromechanical gyroscope) is a miniature rate gyroscope that combines microelectronics and micromechanics based on the pr...

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Problems solved by technology

Chinese patent: A miniature four-channel circulating flow dual-axis silicon jet gyroscope (patent application number: 201510385582.4), which belongs to the miniature jet gyroscope. The piezoelectric film in the sensitive element increases the processing difficulty and cost, and the premise of maintaining the flow rate It is difficult to further reduce its volume

In Chinese patents 201410140298.6 and 201210130318.2, the main components in the sensor sensitive element-heater and thermistor both adopt a suspended cantilever beam structure. Since the heater and thermistor are suspended above the cavity, after the cavity is etched to release the structure, Stress will cause the heater and thermistor to deform or even break, resulting in low yield, and warping deformation will produce an asymmetric gas flow field without angular velocity input, resulting in angular velocity detection errors

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