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Multi-degree-of-freedom displacement measurement system based on two-dimensional grating

A two-dimensional grating and displacement measurement technology, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of restricting the application of two-dimensional grating measurement systems, improve signal quality and displacement measurement accuracy, reduce debugging difficulty, The effect of improving accuracy

Pending Publication Date: 2020-05-19
苏州秦宁微纳光电科技有限公司
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Problems solved by technology

[0007] The above two technical problems are the main difficulties that currently limit the application of two-dimensional grating measurement systems

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  • Multi-degree-of-freedom displacement measurement system based on two-dimensional grating
  • Multi-degree-of-freedom displacement measurement system based on two-dimensional grating
  • Multi-degree-of-freedom displacement measurement system based on two-dimensional grating

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Embodiment Construction

[0030] The technical solutions protected by the present invention will be specifically described below in conjunction with the accompanying drawings.

[0031] see Figure 1 to Figure 7 . The present invention proposes a two-dimensional grating-based multi-degree-of-freedom displacement measurement system for measuring the displacement between a fixed part and a moving part. Specifically, the measurement system includes a reading module 01 and a two-dimensional grating 03, wherein the The reading module 01 and the two-dimensional grating 03 are respectively arranged on the fixed part and the moving part, that is, in one embodiment, the reading module 01 is arranged on the moving part, and the two-dimensional grating 03 is arranged on the fixed part , in another embodiment, the reading module 01 is fixedly arranged on the fixed part, and correspondingly, the two-dimensional grating 03 is fixedly arranged on the movable part, and the data calculated by the reading module 01 and ...

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Abstract

The invention provides a multi-degree-of-freedom displacement measurement system based on a two-dimensional grating, wherein a reading module and a two-dimensional grating are arranged on a moving part and a moving part respectively. The reading module comprises two sets of first displacement sensors arranged in the first direction, two sets of second displacement sensors arranged in the second direction and a distance sensor located in the physical center of the first sensors and the second sensors. According to the invention, the problem that the traditional multi-degree-of-freedom measurement system needs multiple paths of sensing reading systems to be independently installed is solved; precise measurement of two-dimensional plane displacement, rotation amount and displacement in four-degree-of-freedom directions perpendicular to a two-dimensional plane can be realized. And by arranging the distance sensors, the optimal reading distance position of the reading module and the two-dimensional grating is directly adjusted and determined, the technological process of traditional two-dimensional grating installation and debugging is simplified, and meanwhile the technical difficultyof debugging is reduced.

Description

technical field [0001] The invention relates to the field of photolithography equipment, in particular to a two-dimensional grating-based multi-degree-of-freedom displacement measurement system. Background technique [0002] In precision machinery, aerospace, automobile manufacturing, optical processing, semiconductor manufacturing, 3C and other industries, the core technology of the requirements of precision manufacturing technology is the demand for the precision measurement capability of the displacement of high-end equipment moving parts. In modern measurement systems, whether it is precise coordinate position measurement or motion process control, at least two-dimensional accurate measurement of the system table in two orthogonal directions (such as: X, Y axis) is required. In terms of implementation, it is usually realized by using one-dimensional measuring elements or devices in several directions of the workbench. In terms of structure, a stacked method is used to co...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 刘红忠史永胜尹磊陈邦道
Owner 苏州秦宁微纳光电科技有限公司
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