Terahertz PDMS microfluidic type resonant cavity chip and preparation method thereof

Abstract

The invention provides a terahertz PDMS microfluidic type resonant cavity chip and a preparation method thereof. The method comprises the following steps: step 1: preparing a terahertz chip; step 2: preparing a PDMS film; step 2.1: adding a silica gel base and a curing agent to a PDMS (polydimethylsiloxane) mixed liquor, and fully stirring the materials to obtain a PDMS base solution; step 2.2: performing suction filtration on the PDMS base solution; step 2.3: uniformly pouring the PDMS base solution onto a mask through a conduit; step 2.4: heating the mask to obtain a cured PDMS film; step 2.5: cutting the PDMS film and performing punching; and step 3: bonding the PDMS film to a resonant ring of the terahertz chip to form a microfluidic resonant cavity. In the present application, the structure is simple, gold or other conductor materials can be used as a material of a metal layer, the certain defects of the terahertz chip in a liquid measurement method is overcome, PDMS is used to produce the resonant cavity, which enables fixed-point quantification and real-time liquid measurement, the process is simple, and mass production is realized.

Description

technical field [0001] The invention relates to the field of semiconductors, in particular to a terahertz PDMS microfluidic resonant cavity chip and a preparation method thereof. Background technique [0002] Terahertz (THz) waves are electromagnetic waves that lie between microwaves and far infrared rays. In recent years, with the development of ultrafast laser technology, the generation of terahertz pulses has a stable and reliable excitation light source, which has enabled people to study terahertz. Terahertz has a wide range of applications in the fields of biomedicine, safety monitoring, non-destructive detection, astronomy, spectroscopy and imaging technology, and information science, so the study of terahertz is of great significance. The surface terahertz groove structure can transmit terahertz surface waves, and has important applications in the field of terahertz integrated circuits and terahertz chip sensing. However, there are certain defects in the liquid meas...

AI Technical Summary

Problems solved by technology

However, there are certain defects in the liquid measurement method of the terahertz chip, and it cannot be fixed-point quantitatively and measure the liquid composition in real time.

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