Intraconnection structure and making method thereof
A manufacturing method and interconnection technology, applied in semiconductor/solid-state device manufacturing, electrical components, electrical solid-state devices, etc., can solve problems such as short circuits, and achieve the effect of improving reliability and increasing overlapping margins
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[0040] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0041] The present invention will be described more fully with reference to the accompanying drawings of this embodiment. However, the present invention can also be embodied in various forms and should not be limited to the embodiments described herein. In the drawings, the thicknesses of layers and regions may be exaggerated for clarity. The same or similar reference numerals denote the same or similar elements, and the following paragraphs will not repeat them one by one.
[0042] Figure 1A to Figure 1F It is a schematic cross-sectional view of a method for manufacturing an interconnection structure according to an embodiment of the present invention. figure 2 It is a schematic cross-sectional view of an interconnec...
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