Three-degree-of-freedom positioning mechanism driven by electromagnetic stress and control method

Abstract

The invention discloses a three-degree-of-freedom positioning mechanism driven by electromagnetic stress and a control method. The three-degree-of-freedom positioning mechanism driven by the electromagnetic stress comprise a positioning platform, a shell, a base, four identical-structure electromagnetic driving units which are horizontally and symmetrically arranged and a supporting block with a flexible hinge, wherein each electromagnetic driving unit comprises a permanent magnet, a C-shaped iron core, an excitation coil and a moving component, working gas gaps are formed between the end faces of the left side and the right side of the moving components and the inner side faces of the extending ends of the C-shaped iron cores, superposition between static bias magnetic flux generated by the permanent magnets and excitation magnetic flux generated by electrifying the excitation coils is performed, the electromagnetic stress is generated in the working gas gaps and acts on the moving components, so that the moving components move in the gas gap thickness direction, the movement of the moving components is transmitted to the supporting block through the flexible hinge, and then the positioning platform is pushed; and the electrifying mode of the excitation coils is changed, so that the moving components of the four electromagnetic mechanisms cooperatively act, and then the two translational degrees of freedom of the positioning platform in the X-axis direction and the Y-axis direction and one rotation degree of freedom of the positioning platform in the Z-axis direction are achieved. The three-degree-of-freedom positioning mechanism has the characteristics of being high in dynamic response speed, simple in structure, large in driving force and capable of achieving high-precision trace positioning.

Description

technical field [0001] The invention relates to the field of precision drive and control, in particular to a three-degree-of-freedom positioning mechanism driven by electromagnetic stress and a control method. Background technique [0002] With the development of science and technology, there is an urgent need for precision positioning technology with high precision and large travel in the fields of ultra-precision machining and microelectronics engineering. At present, the most commonly used structure of high-precision travel positioning platform is x-axis, y-axis translation and z-axis rotation in series. The driving methods of such mechanisms are mostly voice coil motor drive and piezoelectric drive. The driving mode of the voice coil motor has a fast response speed and a long working stroke, but this type of structure is easily limited by the structural stiffness, and as the structural stiffness increases, the control current of the voice coil motor will increase corresp...

AI Technical Summary

Problems solved by technology

The driving mode of the voice coil motor has a fast response speed and a long working stroke, but this type of structure is easily limited by the structural stiffness, and as the structural stiffness increases, the control current of the voice coil motor will increase correspondingly, and the heat generation will increase accordingly

The piezoelectric drive has a large output force and a fast frequency response, but because the output displacement is small, only tens of microns, a displacement amplification mechanism is required to increase the working stroke, and too many displacement amplification mechanisms will reduce the structural rigidity of the system, thereby reducing the support effect

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