Device and method for measuring defocus distance of micro-scale transparent body based on additional phase plate
A technology of measuring device and phase plate, which is applied to measuring device, phase influence characteristic measurement, using optical device, etc. degree and other issues to achieve the effect of improving stability
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0046] Example 1 (|( SPEC 2 -SPEC 1 ) / (z 2 -z 1 )|The largest case, with Figure 5 )
[0047] (t 2 -t 1 )×(n-n 0 ), (t 3 -t 2 )×(n-n 0 ) and (t 4 -t 3 )×(n-n 0 ) take values of 145 μm, 147 μm, and 150 μm, respectively. Calculated parameters obtained from the phase diagram: SPEC 1 =1810,z 1 = 0; SPEC 2 =1580,z 2 =145μm; SPEC 3 =1795,z 3 =292μm; SPEC 4 =1985,z 4 = 442 μm. The calculated absolute value of the slope of the straight line formed by adjacent measurement points: |(SPEC 2 -SPEC 1 ) / (z 2 -z 1 )|=1.586, |(SPEC 3 -SPEC 2 ) / (z 3 -z 2 )|=1.463 and |(SPEC 4 -SPEC 3 ) / (z 4 -z 3 )|=1.267. Judging|(SPEC 2 -SPEC 1 ) / (z 2 -z 1)|Maximum, the formula used to determine the relative position of the image plane of the imaging system is According to the formula, z=150.73 μm is calculated. Then according to the formula 1 / (1 / f-1 / v)-t 1 ×(n-n 0 )+z calculates that the distance between the phase body and the objective lens is 9.65073mm.
Embodiment 2
[0048] Example 2 (|(SPEC 4 -SPEC 3 ) / (z 4 -z 3 )|The largest case, with Figure 6 )
[0049] (t 2 -t 1 )×(n-n 0 ), (t 3 -t 2 )×(n-n 0 ) and (t 4 -t 3 )×(n-n 0 ) take values of 157 μm, 144 μm, and 150 μm, respectively. Calculated parameters obtained from the phase diagram: SPEC 1 =1960,z 1 = 0; SPEC 2 =1770,z 2 =157μm; SPEC 3 =1500,z 3 =301μm; SPEC 4 =1860,z 4 = 451 μm. The calculated absolute value of the slope of the straight line formed by adjacent measurement points: |(SPEC 2 -SPEC 1 ) / (z 2 -z 1 )|=1.210,|(SPEC 3 -SPEC 2 ) / (z 3 -z 2 )|=1.875 and |(SPEC 4 -SPEC 3 ) / (z 4 -z 3 )|=2.4. Judging|(SPEC 4 -SPEC 3 ) / (z 4 -z 3 )|Maximum, the formula used to determine the relative position of the image plane of the imaging system is According to the formula, z=285.25 μm is calculated. Then according to the formula 1 / (1 / f-1 / v)-t 1 ×(n-n 0 )+z calculates that the distance between the phase body and the objective lens is 9.78525mm.
Embodiment 3
[0050] Example 3 (|(SPEC 3 -SPEC 2 ) / (z 3 -z 2 )|Maximum and SPEC 4 >SPEC 1 case, with Figure 7 )
[0051] (t 2 -t 1 )×(n-n 0 ), (t 3 -t 2 )×(n-n 0 ) and (t 4 -t 3 )×(n-n 0 ) take values of 144 μm, 150 μm, and 156 μm, respectively. Calculated parameters obtained from the phase diagram: SPEC 1 =1770,z 1 = 0; SPEC 2 =1500,z 2 =144μm; SPEC 3 =1860,z 3 =294μm; SPEC 4 =2010,z 4 = 450 μm. The calculated absolute value of the slope of the straight line formed by adjacent measurement points: |(SPEC 2 -SPEC 1 ) / (z 2 -z 1 )|=1.875, |(SPEC 3 -SPEC 2 ) / (z 3 -z 2 )|=2.4 and |(SPEC 4 -SPEC 3 ) / (z 4 -z 3 )|=0.962. Judging|(SPEC 3 -SPEC 2 ) / (z 3 -z 2 )|Maximum and SPEC 4 >SPEC 1 , the formula used to determine the relative position of the image plane of the imaging system is According to the formula, z=128.25 μm is calculated. Then according to the formula 1 / (1 / f-1 / v)-t 1 ×(n-n 0 )+z calculates that the distance between the phase body and the ...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 


