A silicon carbide insulated gate bipolar transistor
A bipolar transistor, insulated gate technology, applied in semiconductor devices, electrical components, circuits, etc., can solve the problems of large forward conduction resistance and low N-type cathode injection efficiency
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[0018] The present invention is described in detail below in conjunction with accompanying drawing
[0019] like figure 2 As shown, the silicon carbide insulated gate bipolar transistor of the present invention is a silicon carbide insulated gate bipolar transistor, and its cell structure includes an anode structure, a drift region structure, a gate structure and a cathode structure; for P-type silicon carbide Insulated gate bipolar transistor, its anode structure includes N+ ohmic contact region 7 and P+ source region 6 on its right side, and metal layer 9 on the upper surface of N+ ohmic contact region 7 and P+ source region; the gate The structure includes the N well region 5, the oxide layer 10 above the N well and the gate metal 8, the P+ source region 6 and the N+ ohmic contact region 7 in the anode structure are within the N well region 5; the drift region structure includes P - the drift region 4 and the P+ field stop layer 3 below it; the cathode structure is mainly...
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