Flexible pressure sensor array with adjustable reference pressure and preparation method thereof
A pressure sensor and reference pressure technology, which is applied in the field of flexible pressure sensor arrays and its preparation, and gas pressure testing on complex curved surfaces, can solve the problems of inapplicable gas pressure accurate measurement, large influence of flow field, and weak flexibility, etc., to achieve Effects of easy strain, improved sensitivity, and improved bending ability
Active Publication Date: 2019-02-22
HUAZHONG UNIV OF SCI & TECH
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Problems solved by technology
For example, CN108195491A proposes that colloids can be used to prepare PDMS structures with microsphere arrays by pouring, combined with carbon nanotube conductive films to make flexible pressure sensors, but their thickness is relatively thick, their flexibility is not strong, and they have a great influence on the flow field, so in practice It is not suitable to be attached to the surface of the aircraft for pressure measurement; CN108225625A proposes to prepare a flexible pressure sensor with a PDMS-carbon nanotube film-PDMS sandwich structure with a microarray, but its thickness is thicker and there is no reference pressure , so it is also not suitable for precise measurements such as gas pressure
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[0053] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and multiple embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.
[0054] figure 1 It is a schematic diagram of the overall structure of the flexible pressure sensor array constructed according to the present invention, such as figure 1 As shown, the overall thickness of the flexible pressure sensor array is not more than 50 μm, and it mainly includes encapsulation layer 1, top electrode 2, PZT piezoelectric film layer 3, bottom electrode 4, PI substr...
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Abstract
The invention belongs to the technical field of flexible electronic and sensors and discloses a flexible pressure sensor array with adjustable reference pressure. The flexible pressure sensor array comprises a sealing layer, a top electrode, a PZT piezoelectric film layer, a bottom electrode, a PI substrate and a micro channel cavity substrate, wherein the top electrode and the bottom electrode are arranged on two sides of the piezoelectric film layer, when pressure acts on the sensor array, the pressure causes strain of the PZT piezoelectric film layer, therefore, charged is polarized in thetop electrode and the bottom electrode to form measurement voltage, the micro channel cavity substrate is a flexible layered structure containing a micro channel structure and a plurality of cavitiesand is sealed with the PI substrate on an adjacent side through bonding processing, and a closed array area is formed by the multiple cavities. The invention also discloses a corresponding preparationmethod. Through the invention, stable reference pressure is provided for the sensor, the overall sensitivity and accuracy are significantly improved, and the flexible pressure sensor array can be directly attached to various complex curved surfaces.
Description
technical field [0001] The invention belongs to the technical field of flexible electronics and sensors, and more specifically relates to a flexible pressure sensor array with adjustable reference pressure and a preparation method thereof, which has higher pressure measurement sensitivity and accuracy than existing products, It is especially suitable for gas pressure testing occasions on complex curved surface surfaces such as aircraft flexible smart skins. Background technique [0002] For aircraft, robots, high-speed rail, submarines, wind tunnels, spacecraft and other equipment, the pressure measurement on the surface is of great significance. For example, the aerodynamic parameters of an aircraft are critical to its flight speed, operational maneuverability, environmental awareness, and safe maintenance capabilities. Among them, the pressure distribution data on the surface of the aircraft plays a guiding role in many aspects. It can not only provide the original data o...
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Login to View More IPC IPC(8): G01L9/08
CPCG01L9/08
Inventor黄永安朱臣
OwnerHUAZHONG UNIV OF SCI & TECH