A heating control system based on wet cleaning machine

Abstract

The invention relates to a heating control system based on a wet cleaning machine. The heating control system includes: a heater, a liquid level sensor, a liquid level circuit breaker, a first digital temperature controller, a second digital temperature controller, a power controller and an integrated machine; the first digital temperature controller and the The heating wire at the bottom of the heater is connected, the second digital temperature controller forms a closed loop with the power controller and the heater; the liquid level sensor is fixed on the side wall of the heater body through a bracket, The liquid level sensor is respectively connected to the second digital temperature controller and the power controller through the liquid level circuit breaker; the integrated machine is respectively connected to the first digital temperature controller and the second digital temperature controller. The temperature controller and the power controller are connected. The invention realizes the rated current protection of the heating system, heating soft start, high and low temperature protection and precise control of the reagent temperature through the system constructed by the digital temperature controller and the power controller.

Description

technical field [0001] The invention relates to the technical field of semiconductor processing equipment, in particular to a heating control system based on a wet cleaning machine. Background technique [0002] Wet cleaning machines clean silicon wafers. The advantage of heated deionized water cleaning is that it helps to remove residual chemicals (especially if certain HF acid solutions are used) and can improve the performance of silicon wafers after drying. Therefore, a stable and safe heating system is needed to heat the reagents used in the washing machine. [0003] The heating system of the existing cleaning machine is generally composed of a heating controller connected to a heater, but this heating method has low control precision, low reliability and lack of safety protection. At the same time, the probe of the liquid level sensor of the existing heater is installed below the outlet pipeline of the heater. In practical applications, after the liquid pump stops pro...

AI Technical Summary

Problems solved by technology

[0003] The heating system of the existing cleaning machine is generally composed of a heating controller connected to a heater, but this heating method has low control precision, low reliability and lack of safety protection

At the same time, the probe of the liquid level sensor of the existing heater is installed below the outlet pipeline of the heater. In practical applications, after the liquid pump stops providing pressure to the liquid in the heater, the heating wire immersed in the liquid The liquid surface will gradually be exposed, (the heater will be damaged due to excessive temperature). At this time, the circuit breaker needs to switch on or cut off the current of the heater according to the signal of the presence or absence of water in the pipeline collected by the liquid level sensor; but After the liquid pump stops working, there will be residual liquid under the outlet pipe of the heater, causing the liquid level sensor to fail, causing the circuit breaker to fail to break the current in the circuit normally, resulting in potential accidents

Images