Heating control system based on wet cleaning machine

Abstract

The invention relates to a heating control system based on a wet cleaning machine. The heating control system comprises a heater, a liquid level sensor, a liquid level circuit breaker, a first digitaltemperature controller, a second digital temperature controller, a power controller and an integrated machine, wherein the first digital temperature controller is connected with a heating wire at thebottom of the heater, the second digital temperature controller, the power controller and the heater form a closed loop, the liquid level sensor is fixed on a side wall of the heater body through a support, the liquid level sensor is connected with the second digital temperature controller and the power controller separately through the liquid level circuit breaker, and the integrated machine isconnected with the first digital temperature controller, the second digital temperature controller and the power controller separately. Rated current protection, heating soft startup, and high and lowtemperature protection of the heating system and accurate control of reagent temperature are realized through the system comprising the digital temperature controllers and the power controller.

Description

technical field [0001] The invention relates to the technical field of semiconductor processing equipment, in particular to a heating control system based on a wet cleaning machine. Background technique [0002] Wet cleaning machines clean silicon wafers. The advantage of heated deionized water cleaning is that it helps to remove residual chemicals (especially if certain HF acid solutions are used) and can improve the performance of silicon wafers after drying. Therefore, a stable and safe heating system is needed to heat the reagents used in the washing machine. [0003] The heating system of the existing cleaning machine is generally composed of a heating controller connected to a heater, but this heating method has low control precision, low reliability and lack of safety protection. At the same time, the probe of the liquid level sensor of the existing heater is installed below the outlet pipeline of the heater. In practical applications, after the liquid pump stops pro...

AI Technical Summary

Problems solved by technology

[0003] The heating system of the existing cleaning machine is generally composed of a heating controller connected to a heater, but this heating method has low control precision, low reliability and lack of safety protection

At the same time, the probe of the liquid level sensor of the existing heater is installed below the outlet pipeline of the heater. In practical applications, after the liquid pump stops providing pressure to the liquid in the heater, the heating wire immersed in the liquid The liquid surface will gradually be exposed, (the heater will be damaged due to excessive temperature). At this time, the circuit breaker needs to switch on or cut off the current of the heater according to the signal of the presence or absence of water in the pipeline collected by the liquid level sensor; but After the liquid pump stops working, there will be residual liquid under the outlet pipe of the heater, causing the liquid level sensor to fail, causing the circuit breaker to fail to break the current in the circuit normally, resulting in potential accidents

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