Vacuum film coating device

A vacuum coating and vacuum technology, applied in vacuum evaporation coating, sputtering coating, ion implantation coating and other directions, can solve the problems of waste of working hours, low production efficiency and high energy consumption in substrate processing

Active Publication Date: 2019-03-15
东莞市一粒米薄膜科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The traditional vacuum coating device usually can only perform vacuum degassing coating on a single substrate loaded on one side of the substrate holder once. It will lead to serious waste of processing time for the substrate, large energy consumption and low production efficiency

Method used

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Embodiment Construction

[0025] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the associated drawings. Preferred embodiments of the invention are shown in the accompanying drawings. However, the present invention can be embodied in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0026] It should be noted that when an element is referred to as being “fixed” to another element, it can be directly on the other element or there can also be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or intervening elements may also be present. The terms "inner", "outer", "left", "right" and similar expressions are used herein for the purpose of descripti...

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Abstract

The invention relates to a vacuum film coating device. The vacuum film coating device comprises a first vacuum chamber row, a second vacuum chamber row, a first transfer mechanism, a second transfer mechanism, a first driving mechanism, a second driving mechanism and a substrate frame. The first vacuum chamber row, the second transfer mechanism and the second vacuum chamber row are arranged in sequence to form a cycle. The opposite sides of the substrate frame are used for loading substrates. The first driving mechanism is used to drive the substrate frame to penetrate through the first vacuumchamber row in the first direction so that the substrate loaded on the first side of the substrate frame can be subjected to the vacuum degassing film coating; the second transfer mechanism is used to transfer the substrate frame from the first vacuum chamber row to the second vacuum chamber row so that the substrate frame can be driven by the second driving mechanism to penetrate through the second vacuum chamber row in the second direction, so that the substrate loaded on the second side of the substrate frame is subjected to the vacuum degassing film coating; and the first transfer mechanism is used to transfer the substrate frame reloaded with the substrates on opposite sides from the second vacuum chamber row to the first vacuum chamber row.

Description

technical field [0001] The invention relates to the technical field of vacuum coating, in particular to a vacuum coating device. Background technique [0002] The traditional vacuum coating device usually can only perform vacuum degassing coating on a single substrate loaded on one side of the substrate holder once. It will lead to serious waste of processing man-hours for the substrate, large energy consumption and low production efficiency. Contents of the invention [0003] Based on this, it is necessary to provide a vacuum coating device capable of improving the vacuum degassing coating efficiency of the substrate. [0004] A vacuum coating device, comprising: a first vacuum chamber row, a second vacuum chamber row, a first transfer mechanism, a second transfer mechanism, a first drive mechanism, a second drive mechanism and a substrate holder, the first The transfer mechanism, the first vacuum chamber row, the second transfer mechanism, and the second vacuum chamber...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/56
Inventor 赵斌
Owner 东莞市一粒米薄膜科技有限公司
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