Terahertz detector and manufacturing method therefor

Abstract

The invention discloses a terahertz detector and a manufacturing method therefor. The terahertz detector comprises a substrate and at least one detection unit. Each detection unit comprises a trench material, and the trench material is disposed on the substrate. The detector also comprises two electrodes which make ohmic contact with two ends of the trench material in the longitudinal direction; and three-dimensional graphene which makes direct or indirect thermal contact with the trench material. The detector provided by the invention takes the three-dimensional graphene as an absorbing body,thereby solving a problem that a trench material cannot sufficiently absorb the terahertz waves, and effectively improving the response sensitivity of the detector.

Description

technical field [0001] The present disclosure relates to the technical field of terahertz detection, in particular to a terahertz detector and a manufacturing method thereof. Background technique [0002] Terahertz wave is a general term for electromagnetic waves in a specific band, usually referring to electromagnetic waves with an oscillation frequency between 0.1 THz and 10 THz. Due to its special position in the electromagnetic spectrum, terahertz waves have the characteristics of good penetration, low single-photon energy, and rich spectral information. They have important application values ​​in security imaging, spectral detection, and information communication. [0003] At present, room-temperature terahertz detectors that are widely used include field effect tube detectors, Schottky detectors, and terahertz detectors. Schottky detectors and FET detectors can obtain higher detection sensitivity, but their spectral response range is limited to bands below 1 THz at pr...

AI Technical Summary

Problems solved by technology

However, the channel materials of current terahertz detectors have low absorption efficiency for terahertz waves, slow response to thermal effects, and generally have problems such as insufficient gain magnification, complex processing technology, and difficulty in applying to terahertz wave bands.

In addition, conventional photopyroelectric detectors generally require terahertz fields to illuminate both sides of the channel material asymmetrically in order to obtain an asymmetric temperature field distribution, which severely limits their practicability and integrability.

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