Reel-to-reel equipment plasma strength deactivation device and method

Abstract

The invention discloses a reel-to-reel equipment plasma strength deactivation device and method, the device comprises an unreeling cabin, a cell quartz ingot, a coil, a quartz tube, a reeling cabin, an equipment frame and a radio frequency controller, the unreeling device is arranged at one end of the upper end surface of the equipment frame, and the reeling cabin is arranged at the other end of the equipment frame. The reel-to-reel equipment plasma strength deactivation device and method have the advantages that the adopted cell quartz ingot is used for ensuring the reaction and protecting uniform inlet of the air source, accordingly, the particle movement of the plasma inclined unreeling cabin can be effectively hindered, the route of the plasma is well shortened, besides, the microporesin the cell quartz ingot can hinder the plasma route, the plasma effective collision is greatly improved to reduce the plasma strength, the plasma entering the unreeling cabin is reduced, the possibility of corroding the outer surface of a copper foil reel and the end surface of the reel edge is realized, the bombarding of the plasma to the substrate surface is weakened, the internal stress of the film and the substrate is reduced, and the film-forming quality and efficiency are improved.

Description

technical field [0001] The invention relates to an attenuation method, in particular to a device and method for attenuating the plasma intensity of roll-to-roll equipment, and belongs to the application technical field of the method for attenuating the plasma intensity of roll-to-roll equipment. Background technique [0002] The PECVD roll-to-roll method is a preparation method that adopts the linkage of reels, PE excited plasma to continuously and rapidly prepare large-area and high-quality graphene. With the help of radio frequency power supply, the carbon source gas containing the atoms of the film components is ionized, and a plasma is formed locally to produce a glow phenomenon. The plasma is chemically active and easily reacts, and the desired graphene film is deposited on the substrate. [0003] In order to enable the chemical reaction to proceed at a lower temperature, the activity of the plasma is used to promote the reaction, but because the intensity and uniformit...

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Problems solved by technology

[0004] The purpose of the present invention is to solve the problem that the strong plasma existing in the low-temperature unwinding cabin area closer to the radio frequency coil will continuously etch the outer surface of the copper foil roll and the end face of the curling edge, and the bombardment of the plasma on the substrate surface will be enhanced. , increasing the internal stress between the film and the substrate, increasing internal defects such as crystal lattices, resulting in a decrease in film quality

After the end face of the copper foil etched by too strong plasma is treated at high temperature, the copper foil is easy to tear due to the stress concentration when starting the winding shaft, and a device and method for reducing the plasma intensity of the roll-to-roll equipment are proposed

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