Diamond wire breaking detection device and wire breaking prediction method thereof

Abstract

The invention discloses a diamond wire breaking detection device and a wire breaking prediction method thereof. The diamond wire breaking detection device comprises a capacitive sensor group, a preprocessing circuit, an A / D converter and a computer, wherein the capacitive sensor group carries out real-time monitoring and detection on the diamond wire; the diamond wires of different abrasion degrees enable the capacitive sensor group to output corresponding capacitance value signals of different sizes; the capacitance value signals are filtered and amplified through the preprocessing circuit, and the signals have fidelity and can be amplified to intensity which can be identified; the processed signals are transmitted to the computer through the A / D converter; and the computer carries out statistical analysis through the obtained capacitance value signals to represent the state of the diamond wire. The wire breaking prediction method specifically comprises the following steps that: the capacitive sensor group monitors the abrasion situation of the diamond wire in real time, the capacitance value signal which contains the abrasion situation of the diamond wire is output, after the capacitance value signal is calculated and analyzed through the computer, the probability density evolution law curve of the tested diamond wire can be obtained, and diamond wire breaking prediction canbe realized according to the probability density evolution law curve.

Description

technical field [0001] The invention belongs to the fault diagnosis technology of diamond wire slicer equipment, and in particular relates to a diamond wire breakage detection device and a breakage prediction method thereof. Background technique [0002] Slicing with a diamond wire slicing machine is a key step in processing and manufacturing silicon wafers. However, during the process of slicing diamond wires, the diamond wires are often broken due to wire jumping and other reasons, which will damage the lead guide wheels and the workpiece to be cut, affecting Normal operation and production caused serious economic losses. [0003] Some diamond wire breakage detection devices currently on the market can only be detected when the diamond wire is broken, send an alarm and take corresponding measures. Or some of the current diamond wire detection devices may make some mistakes, resulting in wrong alarm signals or delayed alarms, and there is no device for real-time monitoring...

AI Technical Summary

Problems solved by technology

Or some of the current diamond wire detection devices may make some mistakes, resulting in wrong alarm signals or delayed alarms, and there is no device for real-time monitoring of diamond wire and health estimation at the same time

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