Fixture structure for grinding ultra-thin single crystal diamond substrate and manufacturing method of fixture structure

Abstract

The invention relates to the technical field of diamond growth, in particular to a fixture structure for grinding an ultra-thin single crystal diamond substrate and a manufacturing method of the fixture structure. According to the fixture structure for grinding the ultra-thin single crystal diamond substrate and the manufacturing method of the fixture structure, grinding errors can be reduced, simultaneous grinding of a plurality of diamond substrates is facilitated, and the consuming time is reduced. The fixture structure comprises a fixing column, a plurality of sets of supporting plates anda plurality of sets of adjusting threaded rods, wherein a plurality of sets of placing grooves are formed in the top edge area of the fixing column, a plurality of sets of adjusting holes are formedin the bottom edge area of the fixing column, and the adjusting holes correspondingly communicate with the placing grooves; and internal threads corresponding to the adjusting threaded rods are arranged on the inner walls of the adjusting holes, and a plurality of sets of rotating plates are correspondingly arranged at the bottom ends of the adjusting threaded rods. The manufacturing method of thefixture structure comprises the following steps that (1) grooving treatment is carried out; (2) thread turning is carried out; (3) waste chips are cleaned; (4) anti-slip mats and cushions are pasted;(5) floating glue is cleaned; (6) the threaded rods are installed; (7) scales are drawn; and (8) welding treatment is carried out.

Description

technical field [0001] The invention relates to the technical field of diamond growth, in particular to a fixture structure and manufacturing method for grinding ultra-thin single crystal diamond substrates. Background technique [0002] As we all know, the existing diamond growth generally adopts the diamond substrate CVD method to grow at a lower temperature. Before CVD growth, the diamond substrate needs to be ground to improve the surface adhesion of the diamond substrate, so that the diamond can be easily deposited on the substrate. However, when the diamond substrate is ground, due to its small thickness and volume, it is very easy to make grinding errors during grinding, and it needs to be ground one by one, which takes a long time. Contents of the invention [0003] In order to solve the above technical problems, the present invention provides a fixture structure and manufacturing method for grinding ultra-thin single crystal diamond substrates that can reduce grin...

AI Technical Summary

Problems solved by technology

[0002] As we all know, the existing diamond growth generally adopts the diamond substrate CVD method to grow at a lower temperature. Before CVD growth, the diamond substrate needs to be ground to improve the surface adhesion of the diamond substrate, so that the diamond can be easily deposited on the substrate. The bottom surface is grown, but when grinding the diamond substrate, due to its small thickness and volume, it is very easy to make grinding errors during grinding, and it needs to be ground one by one, which takes a long time

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