High-precision two-dimensional linear displacement sensor system
A linear displacement sensor, high-precision technology, applied in the field of sensors, can solve the problems of unreasonable electromagnetic structure of the sensor, low position detection accuracy, poor workmanship, etc., achieve high sensitivity, good output signal, and improve the effect of linearity
Active Publication Date: 2019-04-16
XIAN AEROSPACE PRECISION ELECTROMECHANICAL INST
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[0004] The purpose of the present invention is to provide a high-precision two-dimensional linear displacement sensor system to solve the problems of unreasonable electromagnetic structure, poor manufacturability, large dead zone and low position detection accuracy of existing sensors
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[0045] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0046] The premise of the three-float gyro float to achieve high-precision positioning is to achieve high-precision position detection. At present, the main problems are the unreasonable structure of the outer stator of the sensor, low sensitivity, poor precision, and large coupling between the two coordinate directions; the unreasonable post-processing circuit brings The dead zone of the sensor is large. The invention considers the electromagnetic sensitive element of the sensor and the post-processing circuit, and optimizes both the electromagnetic sensitive element and the post-processing circuit.
[0047] from image 3 It can be seen that the high-precision two-dimensional linear displacement sensor system of this embodiment is also based on the L-R measurement principle, including electromagnetic sensitive elements and a post-processing c...
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The invention relates to a sensor, in particular to a high-precision two-dimensional linear displacement sensor system. The high-precision two-dimensional linear displacement sensor system comprises an electromagnetic sensitive element and a post-processing circuit, the electromagnetic sensitive element comprises a stator and a rotor, and the rotor is located on the periphery of the stator; the post-processing circuit comprises a signal conditioning module and a DSP (digital signal processor) module; the signal conditioning module is used for acquiring alternating-current signals output by twogroups of LR bridges corresponding to the same degree of freedom of the electromagnetic sensitive element, the two sets of alternating current signals are converted into direct current signals, and then the two sets of direct current signals are amplified and then are subjected to difference, and AD conversion is performed to obtain a digital signal; and the DSP module is used for receiving the digital signal converted by the AD and processing the digital signal. The problems that an existing sensor is unreasonable in electromagnetic structure, poor in manufacturability, large in dead zone and low in position detection precision are solved.
Description
technical field [0001] The invention relates to a sensor, in particular to a high-precision two-dimensional linear displacement sensor system. Background technique [0002] Inertial navigation technology is widely used in various strategic weapon systems, and its core components are accelerometers and gyroscopes. In the field of inertial instruments, the three-float gyroscope is used as the angle sensor of the moving body, and the three-float gyroscope itself is a complex electromagnetic system, including angle sensors, torque devices, magnetic levitation, dynamic pressure motors, etc., such as figure 1 . Among them, magnetic suspension provides precise centering of five degrees of freedom for the gyro float (one two-dimensional control on the left and right, and one-dimensional control on the axis direction), which is the key to realizing the high precision of the gyro. Relevant studies have shown that the change of the position of the float is 1 nanometer (nm), and the na...
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Login to View More IPC IPC(8): G01C19/02
CPCG01C19/02
Inventor 吴辽樊理王卿孙世杰申志刚李斌刘郭建李逸车长杰杜鑫
Owner XIAN AEROSPACE PRECISION ELECTROMECHANICAL INST