Bulk acoustic resonator with multistage vibration reduction outer frames, and machining method of bulk acoustic resonator

Abstract

The invention discloses a bulk acoustic resonator with multistage vibration reduction outer frames, and a machining method of the bulk acoustic resonator. The bulk acoustic resonator with the multistage vibration reduction outer frames comprises a supporting table, and a resonance body, an external input electrode, an external output electrode and external grounding electrodes, which are located at the top end of the supporting table, and the multistage vibration reduction outer frames; the external input electrode and the external output electrode are symmetrically arranged on the two sides of the top end of the supporting table, and the external grounding electrodes are symmetrically arranged on the two sides of each of the external input electrode and the external output electrode; theresonance body is arranged in the center of the top end of the supporting table, and the two sides of the resonance body are electrically connected with the external input electrode and the external output electrode through corresponding metal wires respectively; and the multi-stage vibration reduction outer frames are uniformly arranged around the resonance body in the center. The problems that in the prior art, the loss of an anchor point is relatively high, the quality factor is difficult to improve and the reliability is low are solved.

Description

technical field [0001] The invention belongs to the technical field of radio frequency micro-electromechanical systems, and in particular relates to a bulk acoustic wave resonator with a multi-stage damping outer frame and a processing method thereof. Background technique [0002] RF micro-electro-mechanical systems (MEMS) technology is an emerging and fast-growing technology, which is widely used to improve the performance and integration of wireless communication systems. For a wireless communication system, the front end, that is, the transmitting path and the receiving path process radio frequency signals, and its circuit size must be equivalent to the wavelength of the signal. In order to miniaturize the RF front-end, acoustic devices based on the RF-MEMS process have been widely used in recent years. Its working principle is to convert electromagnetic wave signals into mechanical wave signals, because the propagation speed of mechanical waves in solids (for example: t...

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Problems solved by technology

[0005] Aiming at the above-mentioned deficiencies in the prior art, the present invention proposes a bulk acoustic wave resonator with a multi-stage damping outer frame and its processing method, which can effectively reduce the anchor point loss of the bulk acoustic wave resonator and improve the quality factor and reliability of the device , which is used to solve the problems of large anchor point loss, difficult improvement of quality factor and low reliability existing in the prior art

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