Detection device for heat stimulation current method
A technology of thermal stimulation current and detection device, which is applied in the direction of measuring device, measuring heat, and optical testing for flaws/defects, etc. It can solve the problems of sample breakdown, test data jump, inability to approach the sample to detect sample temperature, etc.
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[0041] Below in conjunction with each accompanying drawing, the present invention is described in detail.
[0042] like figure 1 , 2Shown in and 3, a kind of detection device that is used for thermal stimulation electric current method comprises vacuum chamber 1; Vacuum pump 2 is connected with vacuum chamber 1, is used for vacuumizing vacuum chamber 1; The lower electrode 13 is arranged in the vacuum chamber 1 and is located directly below the upper electrode 11, and the sample space is between the lower electrode 13 and the upper electrode 11; the heating wire 14 is arranged in the lower electrode 13 for heating the lower electrode 13 ; The cooling mechanism is used to cool the lower electrode 13, and also includes:
[0043] The optical fiber connector 4 is fixed on the inner wall of the vacuum chamber 1;
[0044] Transmission optical fiber 5, one end is connected with the optical fiber connector 4, and the other end passes through the vacuum chamber 1 for connecting with...
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