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Active layer thickness monitoring method

A technology of active layer and insulating layer, which is applied in the monitoring field of active layer thickness, can solve problems such as timing problems, abnormal TFT switches, unstable gate scanning signals, etc., and achieve the effect of avoiding abnormalities

Active Publication Date: 2019-04-23
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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Problems solved by technology

[0004] During the lighting test of the existing liquid crystal display panel, it was found that there were many horizontally discontinuous bright lines on the screen, and the horizontally discontinuous bright lines were more obvious in the red solid color screen, the green solid color screen and the blue solid color screen. After observation, it was found that The adjacent main pixel (Main Pixel) lights up. According to the theoretical analysis of Main Pixel lighting, it is speculated that the active layer of TFT Amorphous Silicon (AS) is too thin, resulting in GOA (Gate Driver on Array, that is, the array substrate Row drive technology, the gate scanning drive circuit is fabricated on the TFT array substrate) The TFT switch in the region is abnormal, resulting in instability of the final output gate scan (GATE) signal, or timing problems

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Embodiment Construction

[0026] In order to further illustrate the technical means adopted by the present invention and its effects, the following describes in detail in conjunction with preferred embodiments of the present invention and accompanying drawings.

[0027] see figure 1 , the present invention provides a method for monitoring the thickness of an active layer, comprising the steps of:

[0028] Step S1, please refer to figure 2 , provide a carrier machine 10, on which a large plate 20 is formed; the large plate 20 includes a panel area 21 and a GOA area 22 surrounding the panel area 21; the GOA area 22 includes a plurality of films A transistor 221; the thin film transistor 221 includes an active layer 2211;

[0029] Step S2, please refer to image 3 , provide a monitoring machine 30, the monitoring machine 30 monitors the thickness of the active layer 2211 of the thin film transistor 221 in the GOA region 22, when the thickness of the active layer 2211 is less than a preset threshold, t...

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Abstract

The invention provides an active layer thickness monitoring method, which is characterized in that the thickness of an active layer of a thin film transistor in a GOA region is monitored through a monitoring machine table; when the thickness of the active layer is smaller than a preset threshold value, the monitoring machine table gives an alarm; when the thickness of the active layer is greater than or equal to the preset threshold value, the monitoring machine table does not give an alarm, so that the manufacturing process can be regulated in time; the abnormality occurrence of a great number of display panels is avoided.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a method for monitoring the thickness of an active layer. Background technique [0002] Thin Film Transistor (TFT) is the main driving element in current Liquid Crystal Display (LCD) and Active Matrix Organic Light-Emitting Diode (AMOLED). It is related to the display performance of the flat panel display device. [0003] Most of the liquid crystal displays currently on the market are backlight liquid crystal displays, which include a liquid crystal display panel and a backlight module. The working principle of the liquid crystal display panel is to pour liquid crystal molecules between the thin film transistor array substrate (ThinFilm Transistor Array Substrate, TFT Array Substrate) and the color filter (ColorFilter, CF) substrate, and apply pixel voltage on the two substrates respectively. and the common voltage, through the electric field formed between the pixel voltage a...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/66
CPCH01L22/12H01L22/20
Inventor 姚龙杰
Owner TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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