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Apparatus for gripping and conveying substrates

A transportation device and substrate technology, applied in the direction of transportation and packaging, conveyors, conveyor objects, etc., can solve the problems of negative pressure fluctuations, high noise, high energy, etc., and achieve the effect of establishing and eliminating negative pressure

Pending Publication Date: 2019-04-26
ASYS AUTOMATISIERUNGSSYST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, devices to date are relatively noisy and have undergone complex plumbing work to generate the vacuum needed to pick up the substrate.
In particular the known vacuum generators, which generate the vacuum via a blower, are very noisy and require a lot of energy
In addition, complex piping work is required due to the large flow cross-sections that have to be worked on
In addition, the generated negative pressure fluctuates depending on the suction points switched on at the same time, which can only be operated with expensive valve trains, blowers and / or pressure regulators

Method used

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  • Apparatus for gripping and conveying substrates
  • Apparatus for gripping and conveying substrates
  • Apparatus for gripping and conveying substrates

Examples

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Embodiment Construction

[0023] figure 1 An advantageous device 1 for gripping and transporting substrates not shown in detail here is shown in a simplified longitudinal section, which is shown in figure 2 Shown in top view. exist figure 2 Its longitudinal section is shown by dashed line B-B in . The device 1 has a gripping head 2 which is elongated and whose length is significantly greater than its width and height. The gripping head 2 is designed in multiple parts. Here, the gripping head 2 has a support structure 3 which is formed from two hollow formations 4 arranged parallel to each other and spaced apart from one another and a plurality of intermediate elements 5 by connecting the two hollow formations 4 to one another.

[0024]According to this embodiment, the three intermediate elements 5 each carry a Venturi nozzle 6 with at least one pressure connection 7 and suction connection 8 . The pressure connection 7 can be connected to a compressed air generator not shown in detail here or to ...

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PUM

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Abstract

The invention relates to an apparatus (1) for gripping and conveying substrates, especially wafers, printed circuit boards, photovoltaic cells or the like, comprising a gripper head (2) which has at least one contact surface (29) for placing on a substrate and at least one suction device for suctioning the substrate against the contact surface (29). According to the invention, the suctioning device has at least one Venturi nozzle (6).

Description

technical field [0001] The invention relates to a device for handling and transporting substrates, in particular wafers, circuit boards, solar cells, etc., which has a gripping head with at least A support surface and suction means for suctioning the substrate onto the support surface. Background technique [0002] Devices of the type mentioned at the outset are known in the prior art. When processing substrates, such as wafers, solar cells, circuit boards, etc., it is often necessary to move the substrate, eg, from a first processing station to a second processing station. This can be carried out manually, but is preferably carried out automatically in order to be able to meet the cleaning requirements, in particular. In order that the substrate itself or components arranged on the substrate, such as electronic / electrical parts, are not damaged during transport, it is necessary to provide a device which ensures reliable and discreet transport of the substrate, where effic...

Claims

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Application Information

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IPC IPC(8): H01L21/683B65G21/20B65G47/91H05K13/04H01L21/677
CPCB65G21/2036B65G47/911H01L21/67706H01L21/6838H05K13/0069
Inventor 弗洛里安·瓦姆斯勒阿希姆·阿诺德克劳斯·奥佩尔特
Owner ASYS AUTOMATISIERUNGSSYST
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