Processing device and method of curved-surface grating

A curved surface grating and processing device technology, which is applied to the photoplate making process, diffraction grating, optics, etc. print quality, flexible choice of effects

Pending Publication Date: 2019-05-03
SHENZHEN INST OF ADVANCED TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0009] The object of the present invention is to provide a manufacturing device and method for a curved grating, which solves the problems of

Method used

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  • Processing device and method of curved-surface grating
  • Processing device and method of curved-surface grating
  • Processing device and method of curved-surface grating

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Embodiment Construction

[0043] The present invention will be further described in detail through specific examples below, but the embodiments of the present invention are not limited thereto.

[0044] The invention provides a processing device for a curved surface grating, the structure of which is as follows figure 1 As shown, it includes an embossing cavity 2, a control gas path and an ultraviolet light source 9. The middle part of the imprinting cavity 2 is provided with a PDMS (polydimethylsiloxane) soft template installation position 5, and the PDMS soft template installation position 5 is used for Install the PDMS soft template 6. After the PDMS soft template 6 is installed on the PDMS soft template installation position 5, the imprint chamber 2 is divided into two compartments, the upper compartment 3 and the lower compartment 4. The PDMS soft template 6 and the PDMS soft template The sealing process is carried out between the installation positions 5, so that the upper compartment 3 and the l...

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Abstract

The invention provides a processing device and method of a curved-surface grating. A PDMS soft template is made, and arranged in an impression cavity, the air pressure of cavities on and under the PDMS soft template is controlled accurately, the PDMS soft template is impressed into the curved-surface grating by using a pressure difference between the upper and lower cavities, and technical parameters including the pressure difference between the upper and lower cavities, the template substrate distance and the substrate inclination angle are regulated to realize high-efficiency accurate manufacturing of the curved-surface grating.

Description

technical field [0001] The invention relates to a processing device and a processing method of a grating, in particular to a processing device and a processing method of a curved grating. Background technique [0002] Gratings are the core components of spectroscopic instruments. According to the surface type of the grating substrate, it can be divided into planar gratings and curved gratings. Typical curved gratings include concave gratings, convex gratings, and cylindrical gratings. Compared with ordinary flat gratings, curved gratings integrate the spectroscopic characteristics of gratings and the focusing characteristics of curved optical elements. Using the curved grating to replace the optical path combination of the planar grating and the curved lens / mirror can reduce the number of components in the spectroscopic instrument, thereby simplifying the optical path and improving the integration and stability of the instrument. Therefore, curved gratings play an indispen...

Claims

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Application Information

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IPC IPC(8): G02B5/18G03F7/00
CPCG02B5/18G03F7/00
Inventor 林慧陈垚鑫赖厚湖马翠余明陈世祈
Owner SHENZHEN INST OF ADVANCED TECH
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