An FBAR design and design inspection method
A filter and piezoelectric layer technology, which is applied in the field of radio frequency technology and MENS, can solve the problem of no provision and achieve the effect of lowering the design threshold
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[0109] Below, the present invention will be further described in conjunction with the accompanying drawings and specific implementation methods. It should be noted that, under the premise of not conflicting, the various embodiments described below or the technical features can be combined arbitrarily to form new embodiments. .
[0110] The structure of a FBAR provided by the embodiment of the present invention is as follows: figure 1 As shown, a silicon substrate 11 made of a single crystal is included, a cavity 12 is etched on the silicon substrate 11, a support layer 13 is arranged on the silicon substrate 11, and the support layer 13 and the silicon substrate 11 together form the cavity 12 form a closed space. The lower electrode layer 14 and the piezoelectric layer 15 are arranged on the supporting layer, and the upper electrode layer 16 is arranged on the piezoelectric layer. The upper electrode layer 16 , the piezoelectric layer 15 and the lower electrode layer 14 form...
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