Uniform anode oxidation process of cavity

Abstract

The invention discloses a uniform anode oxidation process of a cavity, and belongs to the field of surface treatment processing. The uniform anode oxidation process is mainly applied to the aluminum alloy hard anode oxidation cavity with the inner cavity height being 450 mm or above. According to the process, by additionally arranging an inner cavity auxiliary cathode mainly, the electric conductivity of an inner cavity is enhanced, the film growing speed difference of anode films of the inner cavity and an outer cavity due to the problem of poor electric conduction is decreased and even eliminated, and finally the thickness of the anode films of the inner cavity and the outer cavity are uniform and consistent. Only the inner cavity auxiliary cathode needs to be additionally arranged, anyprocess parameter does not need to be changed, operation is easy and convenient, and implementation is easy.

Description

technical field [0001] The invention belongs to the technical field of semiconductor surface treatment and processing, in particular to a cavity part with a height greater than 450mm. It is suitable for the hard anodizing process of the chamber of IC equipment manufacturing industry. Background technique [0002] At present, in the IC equipment manufacturing industry, aluminum alloy cavity parts generally need to be hard anodized to enhance the corrosion resistance of the material. However, the size of such components is relatively large, and it is difficult to ensure the consistency of the long film inside and outside the cavity during the anodizing process. Moreover, using the ordinary hanging method, the film thickness of the inner and outer cavities can differ by about 20-30 μm, so it often happens that the thickness of the inner cavity is at the lower limit, while the thickness of the outer cavity is already out of tolerance. Therefore, in view of the above situation,...

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Problems solved by technology

However, the size of such components is relatively large, and it is difficult to ensure the consistency of the long film inside and outside the cavity during the anodizing process

Moreover, using the ordinary hanging method, the film thickness of the inner and outer cavity can differ by about 20-30 μm, so it often happens that the film thickness of the inner cavity is at the lower limit, while the thickness of the outer cavity is already out of tolerance

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