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Electron cyclotron resonance ion source

An electron cyclotron resonance, ion source technology, applied in the ion source/gun, cyclotron mass spectrometer, parts of the particle separator tube, etc., can solve the problems of weak magnetic field, small size, low performance, etc. The effect of fill rate

Active Publication Date: 2021-02-05
INST OF MODERN PHYSICS CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, in the prior art, the small electron cyclotron resonance ion source has a relatively weak magnetic field due to its small size, and it is difficult to generate ions with a low or even a high charge state in a strong current, so its performance is low

Method used

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  • Electron cyclotron resonance ion source
  • Electron cyclotron resonance ion source
  • Electron cyclotron resonance ion source

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Embodiment Construction

[0023] Certain embodiments of the invention will be described more fully hereinafter with reference to the accompanying drawings, in which some, but not all embodiments are shown. Indeed, various embodiments of the invention may be embodied in many different forms and should not be construed as limited to these set forth embodiments; rather, these embodiments are provided so that this invention will satisfy applicable legal requirements.

[0024] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0025] figure 1 An electron cyclotron resonance ion source 100 according to an embodiment of the present invention is used to generate ion beams. Such as figure 1 As shown, the electron cyclotron resonance ion source 100 includes a permanent magnet device 10 , an injection device 20 c...

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Abstract

The invention provides an electron cyclotron resonance ion source, which is used to generate ion beams. The electron cyclotron resonance ion source includes a permanent magnet device, an injection device connected to one end of the permanent magnet device, and the other end of the permanent magnet device. connected extraction device, the permanent magnet device includes an injection magnetic ring, a six-pole magnetic ring and an extraction magnetic ring connected in sequence, the injection magnetic ring and the extraction magnetic ring jointly provide an axial confinement magnetic field, and the six-pole magnetic ring The ring provides a radial sextupole magnetic field.

Description

technical field [0001] The invention relates to the field of ion accelerators, in particular to an electron cyclotron resonance ion source applied to ion accelerators. Background technique [0002] With the continuous development of technology, ion sources, as devices for extracting ion beams, have been widely used in various types of ion accelerators, ion implanters, ion thrusters and other electronic equipment. Among them, the application of electron cyclotron resonance ion source is relatively mature. However, in the prior art, small electron cyclotron resonance ion sources have low performance due to their small size and weak magnetic fields, which make it difficult to generate ions with low or even high charge states in strong currents. Contents of the invention [0003] In view of the above-mentioned technical problems, in order to overcome the shortcomings of the above-mentioned prior art, the present invention proposes an electron cyclotron resonance ion source. ...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J49/10H01J49/38
Inventor 李家庆孙良亭张雪珍曹云王辉谢祖祺
Owner INST OF MODERN PHYSICS CHINESE ACADEMY OF SCI