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106 results about "Cyclotron resonance" patented technology

Cyclotron resonance describes the interaction of external forces with charged particles experiencing a magnetic field, thus already moving on a circular path. It is named after the cyclotron, a cyclic particle accelerator that utilizes an oscillating electric field tuned to this resonance to add kinetic energy to charged particles.

Instrument for separating ions in time as functions of preselected ion mobility and ion mass

An ion separation instrument includes an ion source coupled to at least a first ion mobility spectrometer having an ion outlet coupled to a mass spectrometer. Instrumentation is further included to provide for passage to the mass spectrometer only ions defining a preselected ion mobility range. In one embodiment, the ion mobility spectrometer is provided with electronically controllable inlet and outlet gates, wherein a control circuit is operable to control actuation of the inlet and outlet gates as a function of ion drift time to thereby allow passage therethrough only of ions defining a mobility within the preselected ion mobility range. In another embodiment, an ion trap is disposed between the ion mobility spectrometer and mass spectrometer and is controlled in such a manner so as to collect a plurality of ions defining a mobility within the preselected ion mobility range prior to injection of such ions into the mass spectrometer. In yet another embodiment, an ion inlet of the ion trap may be electronically controlled relative to operation of the ion mobility spectrometer as a function of ion drift time to thereby allow passage therein only of ions defining a mobility within the preselected ion mobility range. The mass spectrometer is preferably a Fourier Transform Ion Cyclotron Resonance mass spectrometer, and the resulting ion separation instrument may further include therein various combinations of ion fragmentation, ion mass filtering, ion trap, charge neutralization and/or mass reaction instrumentation.
Owner:INDIANA UNIV RES & TECH CORP

Instrument for separating ions in time as functions of preselected ion mobility and ion mass

An ion separation instrument includes an ion source coupled to at least a first ion mobility spectrometer having an ion outlet coupled to a mass spectrometer. Instrumentation is further included to provide for passage to the mass spectrometer only ions defining a preselected ion mobility range. In one embodiment, the ion mobility spectrometer is provided with electronically controllable inlet and outlet gates, wherein a control circuit is operable to control actuation of the inlet and outlet gates as a function of ion drift time to thereby allow passage therethrough only of ions defining a mobility within the preselected ion mobility range. In another embodiment, an ion trap is disposed between the ion mobility spectrometer and mass spectrometer and is controlled in such a manner so as to collect a plurality of ions defining a mobility within the preselected ion mobility range prior to injection of such ions into the mass spectrometer. In yet another embodiment, an ion inlet of the ion trap may be electronically controlled relative to operation of the ion mobility spectrometer as a function of ion drift time to thereby allow passage therein only of ions defining a mobility within the preselected ion mobility range. The mass spectrometer is preferably a Fourier Transform Ion Cyclotron Resonance mass spectrometer, and the resulting ion separation instrument may further include therein various combinations of ion fragmentation, ion mass filtering, ion trap, charge neutralization and / or mass reaction instrumentation.
Owner:INDIANA UNIV RES & TECH CORP

Estimation of ion cyclotron resonance parameters in fourier transform mass spectrometry

The present invention comprises a method and system for accurate estimation of the ion cyclotron resonance (ICR) parameters in Fourier-transform mass spectrometry (FTMS / FT-ICR MS). The parameters are essential to estimating the mass to charge ratio of an ion from FT-ICR MS data, the intended purpose of the instrument. Achieving greater accuracy in the parameters assists in greater accuracy of the mass to charge ratio of an ion, and obtaining an accurate estimation of the mass to charge ratio of an ion further aides in detecting mass with sub-ppm accuracy. Estimating mass in this manner enhances identification and characterization of large molecules. The inventive method and system thereby enhances the data obtained by conventional FTMS by accurately estimating ICR parameters. Ultimately, accurate estimates of the masses of molecules and detection and characterization of molecules from FT-ICR MS data are obtained.
Owner:CEDARS SINAI MEDICAL CENT

Electron-cyclotron resonance plasma reactor with multiple exciters

An Electron-Cyclotron Resonance (ECR) Plasma Reactor with Multiple Exciters is disclosed. The exciters relate to a mechanism that converts the radiation energy to the electron's kinetic energy. With using a suitable antenna distributes the RF energy to distinguished exciter individually, each exciter has its own magnetic coil to build high magnetic field to resonance the electron of the operation gas, ionize the gas and generate high speed electrons. All of the high-speeded electrons can be guided by magnetic flux and accumulated to the remained part of the reaction chamber. There is an auxiliary magnet to cause energized electron moving in a helix path. The helix path makes more chance of the collision between the electron and the process gas. When collision occurs, the electron's kinetic energy activates the process gas and high-density plasma or radicals generated. The auxiliary magnetic field is also used for controlling the uniformity of plasma near the wafer pedestal area. This is a distributed ECR system with multiple RF energy conversion mechanisms, the "exciters". It simplifies the total system complexity by discrete but simpler main magnets, cooling system, low power RF energy sources etc. The invention gives an easy way to build a large-sized ECR just by increasing the number of exciters.
Owner:NI HAO JAN

Fast controllable polarizer for high-power electron cyclotron resonance heating system

The invention belongs to the field of microwave technologies, and specifically relates to a fast controllable polarizer for a high-power electron cyclotron resonance heating system. The fast controllable polarizer comprises a microwave reversing bend, a mounting base plate, a polarization mirror, a polarization mirror rotating mechanism and a rotation driving mechanism, and is characterized in that the microwave reversing waveguide bend is used for transmitting high-power microwaves and realizing 90-degree reversing in transmission direction of the microwaves; the mounting base plate is used for positioning the polarization mirror, the polarization mirror rotating mechanism and the rotation driving mechanism on the microwave reversing bend; the polarization mirror is used for reflecting the microwaves and realizing changes in microwave polarization mode while rotating; the polarization mirror rotating mechanism is used for realizing rotation of the polarization mirror in a vacuum environment; and the rotation driving mechanism is used for realizing accurate positioning control and protection for rotation of the polarization mirror. The fast controllable polarizer is high in positioning accuracy and capable of being fast controlled remotely, can MW-magnitude long-pulse millimeter waves stably and efficiently, and can meet an arbitrary control requirement of the electron cyclotron system for the microwave polarization mode.
Owner:SOUTHWESTERN INST OF PHYSICS

Tandem Fourier Transform Ion Cyclotron Resonance Mass Spectrometer

A tandem Fourier transform ion cyclotron resonance mass spectrometer is provided. In the mass spectrometer, the ions selected by a FT-ICR mass analyzer, which can perform an ion selection process and a mass measurement process with a time interval between the processes, are transmitted through an ion guide to a collision cell, which is located a predetermined distance from the FT-ICR mass analyzer, to split into fragment ions. The fragment ions are transmitted to the FT-ICR mass analyzer that measures the mass of the fragment ions. The fragment ions are generated in the collision cell 60 established separately from the FT-ICR mass analyzer 40 according to the mass spectrometer. Accordingly, It can solve various problems (e.g., the radius reduction of cyclotron motion of colliding ions, or the removal of periphery gas after generating the fragment ions) occurred in a tandem mass spectrometer using a conventional tandem-in-time mass analysis method. Also, a high resolution and with sensitivity measurement can be achieved. Moreover, when a reagent gas instead of a collision gas in the collision cell is injected, the gas phase reaction of the selected ions and the reagent gas can be observed, and the mass of the ions generated in the gas phase reaction can be measured.
Owner:KOREA BASIC SCI INST

Method of depositing a copper seed layer which promotes improved feature surface coverage

We have discovered a method of improving step coverage of a copper seed layer deposited over a semiconductor feature surface which is particularly useful for small size features having a high aspect ratio. Using a contact via as an example of a high aspect ratio feature, we have demonstrated that despite previously-held views, it is possible to increase the copper seed layer coverage simultaneously at the bottom of the via and on the wall of the via by increasing the percentage of the depositing copper species which are ions. The percentage of species ionization which is necessary to obtain sufficient step coverage for the copper seed layer is a function of the aspect ratio of the feature. For features having a 0.25 mum or smaller feature size, an aspect ratio of about 3:1 requires that about 50% or more of the copper species be ions at the time of deposition on the substrate. As the aspect ratio increases to about 4:1, the percentage of species which are ions is preferably increased to between about 60% and 70%. When the aspect ratio is about 5:1 or greater, the percentage of species which are ions is preferably increased to greater than 80%. This increase in the percentage of copper species which are ionized can be achieved using techniques known in the art, such as, for example, laser ablation of the copper target, electron cyclotron resonance, hollow cathode, and applicants' preferred technique, an inductively coupled RF ion metal plasma. We have further discovered that when an inductively coupled plasma is used to increase ionization, an increase in power to the ionization source is not enough to obtain the desired percentage of ions in many cases. It is also necessary to increase the plasma gas pressure. Typically the plasma gas is argon, and the argon pressure in the copper seed layer deposition chamber is increased to fall within the range of about 20 to about 100 mT, preferably between about 30 mT and 70 mT.
Owner:APPLIED MATERIALS INC

Method for extracting and analyzing water-soluble and water-insoluble organic matters in atmospheric fine particulate matter

The invention discloses a method for extracting and analyzing water-soluble and water-insoluble organic matters in an atmospheric fine particulate matter. The method mainly comprises the steps of respectively carrying out ultrasonic extraction on water-soluble and water-insoluble organic matters in the atmospheric fine particulate matter by using ultrapure water and dichloromethane, filtering an extracting solution by using a 0.45[mu]m filter membrane after ultrasonic treatment, blowing to nearly dry with nitrogen, and respectively fixing the volume by using methanol/water (1:1, v/v) and methanol/toluene (1:1, v/v) solutions; and analyzing organic components of the atmospheric fine particulate matter in a positive and negative ion mode by means of direct sample injection by utilizing a 15TFourier transform ion cyclotron resonance mass spectrometer (15T FT-ICR MS) in combination with an electrospray ionization source (ESI) and an atmospheric pressure photoionization source (APPI), andanalyzing the composition characteristics of the organic compound at the molecular level. Compared with a conventional method, the method has the advantages that the pretreatment is easy, convenient and rapid, a high-throughput detection technology and a mass data processing system for organic components of the atmospheric fine particulate matter can be constructed through the high-resolution characteristic of FT-ICR MS, and information can be comprehensively obtained.
Owner:DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI

Electron cyclotron resonance (ecr) plasma source having a linear plasma discharge opening

The invention relates to an electron cyclotron resonance (ECR) plasma source having a linear plasma discharge opening (9, 27, 28, 30), comprised of a plasma chamber, inside of which a centered wave distributor is provided, and having a multi-pole magnetic field arrangement in the area of the linear plasma discharge opening. The centered wave distributor consists of at least two separate wave distributors (3, 4) that are placed inside a respective partial plasma chamber (1, 2, 21, 22, 32, 23). A linear partial plasma discharge opening (7, 8, 23, 24, 34, 35) and multi-pole magnetic field arrangements (10, 11, 38, 39) are provided on each partial plasma chamber (1, 2, 21, 22, 32, 23). The at least two linear plasma discharge openings (7, 8, 23, 24, 34, 35) are arranged with regard to one another in such a manner that, together, they form at least one plasma discharge opening (9, 27, 28, 30) of the ECR plasma source.
Owner:ROTH & RAU B V

Water-cooled high-power electron cyclotron resonance heating system direct current blocking device

The invention belongs to the technical field of microwaves, and particularly relates to a water-cooled high-power electron cyclotron resonance heating system direct current blocking device which comprises a corrugated waveguide A, a corrugated waveguide B, an insulating sleeve and a cooling water pipe located outside the insulating sleeve, wherein the corrugated waveguide A and the corrugated waveguide B are relatively and coaxially placed, insulating sleeve connecting flanges are arranged on the corrugated waveguides, the inner side portions of the corrugated waveguides are located in the insulating sleeve, the insulating sleeve connecting flanges are clamped on the two sides of the insulating sleeve, and a certain gap is reserved between the waveguide butt joint end faces of the two corrugated waveguides. The insulating sleeve positions the metal waveguides on the two sides; a gap between waveguides is arranged, a transmission system and a microwave electron cyclotron pipe of an electron cyclotron transmission system connected separately with waveguides are isolated in an insulation mode. Different from common insulation isolation in the prior art, a cooling pipe structure is designed outside the insulation sleeve, and two effects are achieved, besides the cooling effect, microwaves leaked out of the gap between waveguides can be absorbed.
Owner:SOUTHWESTERN INST OF PHYSICS
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