Film coating detecting device, film coating equipment and detecting piece switching method
A technology of detection device and coating equipment, applied in sputtering coating, vacuum evaporation coating, ion implantation coating and other directions, can solve problems such as production process interference
Active Publication Date: 2019-05-24
BOE TECH GRP CO LTD +1
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Problems solved by technology
[0004] Embodiments of the present invention provide a coating detection device, coating equipment, and detection chip switching method to solve the problem that the production process may be interfered when the detection chip for detecting the thickness of the film layer in the coating equipment is switched.
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[0032] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.
[0033] The invention provides a coating detection device, such as figure 1 As shown, the coating detection device includes a detection disc 110 , a power supply assembly and a drive assembly 120 .
[0034] In this embodiment, the number of detection discs 110 is at least two, such as figure 2 As shown, each detection disc 110 is used to set at least one detection piece 111 .
[0035] When measuring the coating, the commonly used detection piece 111 ...
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The invention provides a film coating detecting device, film coating equipment and a detecting piece switching method. The film coating detecting device comprises at least two detecting disks, at least two power source assemblies and a driving assembly, wherein each detecting disk is used for being provided with at least one detecting piece, and comprises a first cover plate, and each first coverplate is provided with a first through hole penetrating through the first cover plate; one detecting piece on each detecting disk is right opposite to the corresponding first through hole; each powersource assembly supplies power for at least one detecting disk; and the driving assembly is connected with the at least two detecting disks, and is used for driving one detecting disk in the at leasttwo detecting disks to move to the assigned position. In this way, due to the film coating detecting device, when the detecting disks rotate on their axes to switch the detecting pieces, the generatedcurrent noise cannot disturb the detecting piece used for detection at current, and therefore the possibility that the detection result and the production progress are disturbed is lowered.
Description
technical field [0001] The invention relates to the field of coating technology, in particular to a coating detection device, coating equipment and a detection piece switching method. Background technique [0002] Coating processes such as vacuum evaporation are widely used in the production process of OLED (Organic Light-Emitting Diode, Organic Light-Emitting Diode) display devices and other products. The thickness of some film layers in these products is very low, usually between several nanometers and hundreds of nanometers. If the thickness is abnormal, it may lead to abnormal performance of the product. Therefore, it is necessary to monitor the thickness of the film layer to monitor the coating process. Control, so as to realize the control of the film thickness. [0003] The existing film thickness detection is usually realized by QCM (Quartz Crystal Microbalance). During the coating process, the material of the film layer will be deposited on the QCM crystal oscillat...
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Inventor 文凯刘洋李有亮饶勇徐天宇刘金彪陈立蒲文华卫勇勇黄平安刘祥蒋勤文刘坤龙孙尚书
Owner BOE TECH GRP CO LTD