Mini penning ion source
A Penning ion source, miniature technology, applied in the direction of ion beam tube, discharge tube, electrical components, etc., can solve the problems of cathode and anode cylinder fire, large amount of hydrogen, affecting plasma, etc. Uniform, hydrogen distribution effect
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[0031] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0032] refer to figure 1 and figure 2 , is a kind of miniature Penning ion source disclosed by the present invention, including a casing 1, and the casing 1 is made of a tungsten-copper alloy material resistant to high temperature and high pressure and low outgassing. An anode cylinder 2 is fixedly connected to the casing 1, and the anode cylinder 2 is made of copper, and the anode cylinder 2 is located in the middle of the casing 1. Both ends of the casing 1 are fixedly connected with a cathode 3, and the cathode 3 is made of 100% pure tantalum with low outgassing. The casing 1 is located in the magnetic field, the direction of the magnetic field is parallel to the length direction of the anode cylinder 2, the magnetic field strength is 5000GS-6000GS, an insulating part 4 is arranged on the cathode 3, and the insulating part 4 includes a first insulating ...
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