A transmissive multi-alkali photocathode with wide spectral response and its manufacturing method

A technology of photocathode and manufacturing method, which is applied in the direction of luminescent cathode manufacturing, photoemission cathode, main electrode of discharge tube, etc.

Active Publication Date: 2021-02-09
NORTH NIGHT VISION TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] The present invention proposes a transmissive multi-alkali photocathode with wide spectral response and its manufacturing method, which overcomes the shortcomings of the prior art and solves the problem that the existing multi-alkali photocathode does not have short-wave ultraviolet, visible light and long-wave near-infrared spectral responses. Therefore, the spectral response of the multi-alkali photocathode has a high spectral response from 200nm of ultraviolet light to 950nm of near-infrared light, which meets the demand for simultaneous detection of ultraviolet, visible light and near-infrared wide spectrum

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  • A transmissive multi-alkali photocathode with wide spectral response and its manufacturing method
  • A transmissive multi-alkali photocathode with wide spectral response and its manufacturing method
  • A transmissive multi-alkali photocathode with wide spectral response and its manufacturing method

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Embodiment 1

[0034] A non-imaging wide-spectrum response multi-alkali photocathode is manufactured by using a manufacturing method of a wide-spectrum response transmission-type multi-alkali photocathode proposed by the invention. For non-imaging vacuum photodetection devices, radial grids are used when making wide-spectrum response multi-alkali photocathode, see Figure 7 .

[0035] The manufacturing process of the broad-spectrum multi-alkali photocathode adopts the multi-alkali photocathode manufacturing process. The cathode glass window is made of synthetic quartz glass window, and the grade of the material is JGS1. The basic method is to put the cathode glass window, evaporation source K, Na, Cs and Sb, grid, etc. into the vacuum cavity of the cathode production equipment, and then vacuumize the vacuum cavity at 380°C with an oven. Bake for 12 hours. After high temperature baking, the vacuum degree of the vacuum chamber should not be lower than 10 -8 support. After the vacuum bakin...

Embodiment 2

[0040] An image-type wide-spectrum response multi-alkali photocathode is fabricated by using a manufacturing method of a transmission-type multi-alkali photocathode with wide-spectrum response proposed by the invention. For imaging-type vacuum photodetection devices, square hole-shaped grids are used when making multi-alkali photocathode with wide spectral response, see Figure 8 . On the premise of the same duty cycle of the grid, the higher the density of the grid, the higher the resolution of the multi-alkali photocathode.

[0041] The manufacturing process of the broad-spectrum multi-alkali photocathode adopts the traditional multi-alkali photocathode manufacturing process. The cathode glass window is made of synthetic quartz glass window, and the grade of the material is JGS1. The basic method is to put the cathode glass window, evaporation source K, Na, Cs and Sb, grid, etc. into the vacuum cavity of the cathode production equipment, and then vacuumize the vacuum cavit...

Embodiment 3

[0046] The schematic diagram of the surface structure of the multi-alkali photocathode made by the method of the present invention is shown in Figure 5 . From Figure 5 It can be seen that compared with the traditional multi-alkali photocathode, the surface of this multi-alkali photocathode is not flat, and the part blocked by the grid is thinner, which has the characteristics of the S20-B multi-alkali photocathode; The blocked part is thicker and has the characteristics of the S25-R multi-alkali photocathode. The thinner part can have a higher spectral response to ultraviolet light, while the thicker part has a higher spectral response to near-infrared light, so its spectral response is the superposition of the spectral response of thin multi-alkali photocathode and thick multi-alkali photocathode . The typical spectral response curves of the transmissive multi-alkali photocathode made by the method of the present invention are shown in Figure 6 .

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Abstract

The invention belongs to the field of photocathode, and relates to a transmissive multi-alkali photocathode with wide spectral response and a manufacturing method thereof. The transmissive multi-alkali photocathode is manufactured using a traditional multi-alkali photocathode manufacturing method. 2 During the fabrication of the KSb base layer, when its thickness reaches the Na 2 At the desired thickness of the KSb base layer, place a grid in front of the multi-alkali photocathode and proceed with Na 2 The KSb substrate layer was fabricated to be as thick as the Na in the S25‑R multialkali photocathode 2 The thickness of the KSb base layer; after this, the grid is removed and the Cs 3 Fabrication of Sb surface layer. The method of the invention overcomes the shortcomings of the prior art, and solves the problem that the existing multi-alkali photocathode does not have short-wave ultraviolet, visible light and long-wave near-infrared spectral responses.

Description

technical field [0001] The invention belongs to the field of photocathode, and relates to a transmissive multi-alkali photocathode with wide spectral response and a manufacturing method thereof. Background technique [0002] Multi-alkali photocathodes are widely used in vacuum optoelectronic devices such as intensifiers and photomultiplier tubes. The chemical composition of the multi-alkali photocathode is Na, K, Cs and Sb, and the structure is composed of cathode glass window 1, Na 2 KSb basal layer 2 and Cs 3 Composed of Sb surface layer 3, see figure 1 . The function of cathode glass window 1 is to support Na 2 KSb basal layer 2, Na 2 The role of the KSb base layer 2 is to absorb photons and generate photoelectrons; while the Cs 3 The role of the Sb surface layer 3 is to reduce the Na 2 The surface work function of the KSb base layer 2 . According to the three-process theory of photoemission, the first process of photoemission is that the incident light 4 passes t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J9/12H01J1/34
Inventor 李晓峰黄丽书汤文梅李永春潘治云
Owner NORTH NIGHT VISION TECH
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