Charge conversion film for ion beam charge conversion device
A technology of charge conversion and ion beam, which is applied in ion beam tubes, processing with charge exchange devices, circuits, etc. It can solve the problems of inability to make thin films, difficult control of film thickness, large deviation of film thickness, etc., and achieve easy processing , Excellent heat resistance and high physical strength
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[0083] Examples are shown below, and the embodiment of the present invention will be further described in detail. Of course, the present invention is not limited by these embodiments, and there may be various forms for the details, which is obvious.
[0084] (Physical property evaluation method)
[0085]
[0086] The thickness of the charge conversion film of the present invention and the polymer thin film used as a raw material has an error of about ±5 to 10%. Therefore, the film thicknesses of the charge conversion film and the polymer thin film were measured at 10 different points in each sample, and the arithmetic mean thereof was taken as the thickness of each sample.
[0087]
[0088] Calculate the volume (cm 3 ), and separately measure the weight (g) of the charge conversion membrane, from the density (g / cm 3 ) = weight (g) / volume (cm 3 ) to calculate the density of the charge conversion film. In addition, the weight per unit area (mg / cm 2 ) = weight (mg) / ...
manufacture example 1
[0094] Mix 20 g of acetic anhydride and 10 g of isoquinoline in 100 g of 18 wt % DMF solution of polyamic acid synthesized by pyromellitic anhydride and 4,4'-diaminodiphenyl ether at a molar ratio of 1 / 1. The curing agent is stirred and degassed by centrifugation, and cast on aluminum foil. From stirring to defoaming, cooling to 0°C was performed. The laminated body of the aluminum foil and the polyamic acid solution was heated at 120° C. for 150 seconds, and at 300° C., 400° C., and 500° C. for 30 seconds each, and then the aluminum foil was removed to produce polyimide films with different thicknesses. Regarding the thickness of the polyimide film, several types of films having different thicknesses in the range of 25 to 200 μm were produced by adjusting the casting speed and the like.
Embodiment 1
[0096] Four kinds of polyimide films having a thickness ranging from 25 to 200 μm were heated up to 1000° C. at a rate of 10° C. / min in nitrogen gas in an electric furnace, and held at 1000° C. for 1 hour to perform pretreatment. Next, the obtained carbonized film was placed inside a cylindrical carbon film heater, and heated to 2400° C. at a temperature increase rate of 20° C. / min. After reaching this temperature, the power to the heater was turned off, and cooled to room temperature to prepare charge conversion films 1 to 4 . The treatment was performed under a pressure of 0.1 MPa in an argon atmosphere.
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